2021
DOI: 10.1002/smll.202100140
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Batch Fabrication of High‐Quality Infrared Chalcogenide Microsphere Resonators

Abstract: Optical microsphere resonators working in the near‐ and mid‐infrared regions are highly required for a variety of applications, such as optical sensors, filters, modulators, and microlasers. Here, a simple and low‐cost approach is reported for batch fabrication of high‐quality chalcogenide glass (ChG) microsphere resonators by melting high‐purity ChG powders in an oil environment. Q factors as high as 1.2 × 106 (7.4 × 105) are observed in As2S3 (As2Se3) microspheres (≈30 µm in diameter) around 1550‐nm waveleng… Show more

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Cited by 4 publications
(5 citation statements)
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“…Figure 2e,f presents close-up cryo-TEM images of the surface of the microsphere in Figure 2d, with estimated maximal and minimal rootmean-square surface roughness of 4.7 nm (Figure 2e) and 1.8 nm (Figure 2f), respectively. Compared with conventional microcavities (e.g., silica, [43] chalcogenide microspheres [44] ) that have been intensively investigated, this relatively large surface roughness of the ice microspheres may be mainly attributed to the rapid freezing process, which can render ice microspheres polycrystalline, and thereby increase the surface inhomogeneity. Nevertheless, we believe it is possible to further reduce the surface roughness by optimizing the fabrication parameters (e.g., freezing rate, and ambient humidity), [45,46] and/or performing a thermal annealing process [11,47] at low temperatures to eliminate the defects like microcracks on the surface of ice microspheres.…”
Section: Resultsmentioning
confidence: 99%
“…Figure 2e,f presents close-up cryo-TEM images of the surface of the microsphere in Figure 2d, with estimated maximal and minimal rootmean-square surface roughness of 4.7 nm (Figure 2e) and 1.8 nm (Figure 2f), respectively. Compared with conventional microcavities (e.g., silica, [43] chalcogenide microspheres [44] ) that have been intensively investigated, this relatively large surface roughness of the ice microspheres may be mainly attributed to the rapid freezing process, which can render ice microspheres polycrystalline, and thereby increase the surface inhomogeneity. Nevertheless, we believe it is possible to further reduce the surface roughness by optimizing the fabrication parameters (e.g., freezing rate, and ambient humidity), [45,46] and/or performing a thermal annealing process [11,47] at low temperatures to eliminate the defects like microcracks on the surface of ice microspheres.…”
Section: Resultsmentioning
confidence: 99%
“…Fabrication of Chalcogenide Microspheres: The As 2 S 3 microspheres with excellent surface smoothness and extremely low eccentricity were batchfabricated according to the recently developed oil-based approach. [27] High-purity (>99.999%) As 2 S 3 fused lumps (04 1980, Alfa Aesar) were first triturated into powders and mixed with high-purity methyl silicone oil (a kind of heat transfer oil). Then, the oil suspension was heated to ≈260 °C and kept for more than 5 min to make As 2 S 3 powders melt into microspheres (the generation of toxic As 2 O 3 was avoided thanks to the oxygen-free environment provided by the methyl silicone oil).…”
Section: Methodsmentioning
confidence: 99%
“…Experimentally, high-quality As 2 S 3 microspheres (Figure 2a) with sizes ranging from several to hundreds of micro meters were batch-fabricated by melting As 2 S 3 powders in an oil environment (see the Experimental Section). [27] The scanning electron microscopy (SEM) image of a 77.9 µm diameter As 2 S 3 microsphere (Figure 2a, inset) shows that as-fabricated As 2 S 3 microspheres have a nearly perfect round shape and excellent surface smoothness, which are beneficial for highquality imaging. A commercial Blu-ray disk (BD) consisting of 220 nm wide stripes and 100 nm wide grooves (Figure 2b), which cannot be resolved by a 100× objective (NA = 0.75) equipped microscope (Figure 2b, inset) under white-light illumination (peaked at λ p = 646 nm), was used as a sub-diffraction-limited specimen.…”
Section: Full-immersed In Pmma Filmmentioning
confidence: 99%
“…in which κ 0 is the intrinsic loss rate, κ ex is the coupling loss rate and T is the transmission). More recently, Xie et al used As 2 S 3 biconical tapered fibers for the first characterization of ChG microsphere resonators in the mid-IR re-gion (Figure 3c) [65]. A 1.6-µm-diameter As 2 S 3 fiber taper was used for near-field coupling with ChG microspheres with the coupling loss less than 3 dB over 4.465-4.705 µm.…”
Section: Photonic Applications 41 Near-field Optical Couplersmentioning
confidence: 99%