Basic relationships in electronegative plasmas with a multiplicity of negative and positive ion species

Abstract

Recent simulations by So et al (2002 J. Phys. D 35 2978 have shown inter alia that in CF 4 where there are two negative ions of comparable density, the plasma is structured, in that there are essentially three regions so far as the negative ions are concerned. In the inner region one negative ion species is concentrated, in the outer region electrons dominate over negative ions, while the intermediate has only one species of negative ion.

Electrical characterization of radio frequency discharges

“…This apparent contradiction is a result of initial assumptions made by Druyvesteyn, and limits S62 the applicability of that analysis. Additional issues concern the measurement of n + , particularly in the case where negative ions may be present; see, for example, [25,33,34] and references therein.…”

Electronegative plasmas diluted by rare gases

“…The history of the understanding of electronegative plasmas over the past 50 years has been a tortuous one, so rather than give a comprehensive list of references we give recent reviews and critiques where longer lists can be found [1][2][3][4][5].…”