Basic investigation of noncontact transportation system for large TFT-LCD glass sheet used in CCD inspection section

Amano, Kazuki; Yoshimoto, Shigeka; Miyatake, Masaaki; Hirayama, Takuya

doi:10.1016/j.precisioneng.2010.08.010

Cited by 41 publications

(24 citation statements)

References 2 publications

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“…이와 같이 대형화 작업에 유리한 로봇 팔에 의한 기계 또는 진공 흡착 방식이 있다 [2,3] . 셋째, 트레이나 카세트에 유리 원판을 적재하여 로봇팔로 적하 [5] . 이외에도 슬릿 구조 방식으로 컨베이어 시스템의 제작 비용과 공기 소모량 저감에 대한 일부 연구를 통하 여 세라믹 분말의 소결 필터 형태의 다공성 물질 적용 보다 개선된 결과를 제시하고 있다 [6] .…”

Section: 서 론unclassified

Non-Contact Level on Air Levitation Table with Porous Chamber Array

Kim

Jeong²,

Lee³

et al. 2013

Journal of manufacturing engineering & technology

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Article history:This paper presents an applicable basic design that can configure non-contact levitation table for conveying a large sheet of glass. The suggested air levitation table consists of a series of air chambers with porous pads and fans as the conveyor system. The air supply chambers are arrayed to supply an adequately strong upward airflow for supporting the glass. Levitation is controlled by the size and discharge velocity, of the chamber arrays, as well as the glass supporting height. After pre-evaluation of the glass rigidity and the filer functional performance, a one-way fluid structure interface (FSI) analysis is performed for predicting pressure and deflection working of the 8G glass in the transverse and longitudinal directions, respectively. After comparing calculated levels of flatness of the glass, it determines the chamber array for the linear non-contact conveying motion. 작업에 유리한 로봇 팔에 의한 기계 또는 진공 흡착 방식이 있다 [2,3] . 셋째, 트레이나 카세트에 유리 원판을 적재하여 로봇팔로 적하

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Section: 서 론unclassified

Non-Contact Level on Air Levitation Table with Porous Chamber Array

Kim

Jeong²,

Lee³

et al. 2013

Journal of manufacturing engineering & technology

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“…0 is calculated. A finite volume method (FVM) is used to solve equations (9) and (12) to gain the pressure status in each grid. It should be noted that when the radius becomes extremely small, p/r tends to infinity, causing these equations to be unsolvable.…”

Section: Theoretical Modelmentioning

confidence: 99%

“…They investigated the air film pressure distribution and found that the model can provide close approximations to the experimental data, but lack of a detailed description on the experimental procedure. Very recently, Amano et al 9 developed an air conveyor system involving alternately placed 19 mm square porous air supply and exhaust pads. Their numerical and experimental results indicate that a wavy deformation of the large-sized glass sheet is easily caused when quiescently supported by the airpad system.…”

Section: Introductionmentioning

confidence: 99%

Modelling and experimental validation of dynamic characteristics of porous-walled air film for non-contact conveyor system

Zhong

Liu

et al. 2012

Proceedings of the Institution of Mechanical Engineers, Part J:

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Air film conveyors equipped with porous pads have been developed to bring the liquid crystal display into a non-contact state during transportation process. In this study, a theoretical model of one porous-walled radial flow, considering the effects of velocity slip at the surface of the porous medium, is established within a representative region, and its validity is verified by vibrating a moveable plate close to the porous surface to conduct investigations on pressure dynamic response. Due to the air damping effects, an apparent pressure hysteresis is observed when the air film subjected to periodic sinusoidal squeeze, and particularly for a given gap thickness, the pressure show approximate proportion to the squeezing velocities. A slip coefficient valued 0.004 is determined and applied to the theoretical model to study the air damping characteristics. In accordance with the experimental results, it is found that the air damping is greatly affected by the region radius, but little by the supply flow rate. Also, it is confirmed that the velocity slip is capable of inhibiting the damping effect. Moreover, free-decay oscillation of a suspended workpiece is inspected. The results indicate that the oscillating amplitude continuously attenuates until the workpiece finally becomes stable, and any change to the region radius or the supply flow rate can exert direct or indirect impact on the decay speed.

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“…Belforte et al [24,25] showed a considerable pressure drop between the upstream and downstream, and verified the capability of porous media to eliminate pressure peak compared with the case involving an orifice. Amano et al [26] and Oiwa et al [27] developed air conveyor systems that use sintered metal porous air supply pads. In these applications, air compressibility cannot be ignored, and therefore, the conventional correlation of friction characteristics needs to be reconstructed.…”

Section: Introductionmentioning

confidence: 99%

Measurement and Determination of Friction Characteristic of Air Flow through Porous Media

Zhong

Tao

et al. 2015

Metals

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Sintered metal porous media currently plays an important role in air bearing systems. When flowing through porous media, the flow properties are generally represented by incompressible Darcy-Forchheimer regime or Ergun regime. In this study, a modified Ergun equation, which includes air compressibility effects, is developed to describe friction characteristic. Experimental and theoretical investigations on friction characteristic are conducted with a series of metal-sintered porous media. Re = 10 is selected as the boundary for a viscous drag region and a form drag region. Experimental data are first used to determine the coefficient α in the viscous drag region, and then the coefficient β in the form drag region, rather than both simultaneously. Also, the theoretical mass flow rate in terms of the modified Ergun equation provides close approximations to the experimental data. Finally, it is also known that both the air compressibility and inertial effects can obviously enhance the pressure drop.

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Basic investigation of noncontact transportation system for large TFT-LCD glass sheet used in CCD inspection section

Cited by 41 publications

References 2 publications

Non-Contact Level on Air Levitation Table with Porous Chamber Array

Non-Contact Level on Air Levitation Table with Porous Chamber Array

Modelling and experimental validation of dynamic characteristics of porous-walled air film for non-contact conveyor system

Measurement and Determination of Friction Characteristic of Air Flow through Porous Media

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