Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage

Ghazaly, Mariam; Sato, Kaiji

doi:10.1016/j.precisioneng.2011.07.008

Cited by 6 publications

(2 citation statements)

References 32 publications

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“…These actuators have become very popular due to their high precision motion and low cost, however, their non-linear properties have made them very difficult to control. In the past, many researchers used the linearization method for eliminating the nonlinear characteristics of the various actuators [6,9,[30][31][32]. Their main objective was to suppress and eliminate the non-linear characteristics of hysteresis and uncontrolled magnetic flux distribution in the electromagnetic systems, which enabled the implementation of the actuators in combination with the traditional PID controllers.…”

Section: Introductionmentioning

confidence: 99%

Motion Characterization of a Switched Reluctance Actuator – A Signal Driven Approach

2021

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In this paper, the researchers have described the development, design and characterization of a Switched Reluctance (SR) actuator, with a rotary motion, having a single-excitation activity. This SR actuator design consisted of a stator and rotor core and was based on the simplest SR actuator model design, with a Stator-to-Rotor pole ratio (S: R) of 6:4. In this design, the winding was coiled at Phase A, which enabled the single step motion characterization based on a single excitation. This SR actuator prototype showed a compact size, with a 36 mm stack length and a 60 mm outer diameter. This feature allowed small machine applications like the precision robotic machining, but required a low production cost, as it lacked a permanent magnet. On the other hand, the SR actuator consisted of highly non-linear characteristics and showed uncontrolled motion behavior. While achieving a very precise motion, it is important to suppress the non-linear characteristics of an actuator. Hence, the researchers designed the linearizer unit based on its characterization at Position 0°, which was related to the excitation current and the rotary angles for the various initial rotor positions. This initial position was chosen as it reflected the characteristics which indicated the self-starting characteristics. Thereafter, the researchers experimentally investigated the appropriate driving signal for this SR actuator as the normal step input signal showed a lower precision motion because of the discharging effect-related issues.

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Section: Introductionmentioning

confidence: 99%

Motion Characterization of a Switched Reluctance Actuator – A Signal Driven Approach

2021

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“…Fig.1: Driving procedure for the bi-directional motien ofthe electrostatic actuator(Ghazaly and Sato, 2012), …”

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1D21 The evaluation of a locking function for a vertical stage electrostatic actuator(The 12th International Conference on Motion and Vibration Control)

Ghazaly

Sato

2014

MoViC

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The present paper validates the effectiveness of the characteristic switching as a locking function for a vertical motion multilayer thin electrostatic actuator supported by only lubricating oil. In the electrostatic actuator, the friction forces often deteriorate the response and positioning accuracy ofa control system, especially when the lightweight electrode layers are supported by only lubricating oil, However, the contact condition between the electrode layers can be changed by the attractive forces resulting from the driving signal waveforms, which consequently infiuences the frictional effect. The large frictional effect that is generated is usefu1 as a locking function which is needed to precisely maintain the stage position especially in vertical motion stages. In this paper, suitable driving signal wavefbrms for switching between two frictional conditions (i,e., Iow friction for the wide and fbst motion and high friction for the fine motion with a large holding force) are examined and clarified for the vertical motion stage. First, the working principles and experimental setup ofthe electrostatic actuator in the yertical rnotion stage are discussed. Then, the open-loop characteristics under the vertical motion stage are discussed based on the frictional effect. Lastly, the resultant effects of the driving signals on the vertical motion characteristics were evaluated, which concluded with the discussion in the sigrial selection on demand as the locking function. lvwords : Multilayer electrostatie actuator, Lubricating oil, Locking function, Holding force and Vertical motlon stage.

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Design of a High Force Density Tubular Linear Switched Reluctance Actuator (TLSRA) Without Permanent Magnet

Yeo

Ghazaly

Chong

et al. 2017

Communications in Computer and Information Science

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Basic characteristics of a multilayer thin electrostatic actuator supported by lubricating oil for a fine-motion stage

Cited by 6 publications

References 32 publications

Motion Characterization of a Switched Reluctance Actuator – A Signal Driven Approach

Motion Characterization of a Switched Reluctance Actuator – A Signal Driven Approach

1D21 The evaluation of a locking function for a vertical stage electrostatic actuator(The 12th International Conference on Motion and Vibration Control)

Design of a High Force Density Tubular Linear Switched Reluctance Actuator (TLSRA) Without Permanent Magnet

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