2012
DOI: 10.1143/jjap.51.05eb03
|View full text |Cite
|
Sign up to set email alerts
|

Barrier Integrity of Electroless Diffusion Barriers and Organosilane Monolayer against Copper Diffusion under Bias Temperature Stress

Abstract: Barrier integrity of electroless NiB and CoWP/NiB thin layers against copper (Cu) diffusion was evaluated by time-dependent dielectric breakdown (TDDB) under bias temperature stress (BTS) using metal oxide semiconductor (MOS) test structures. The BTS tests were carried out also for an approximately 2.2-nm-thick organosilane monolayer (OSML), which has been used as the underlayer of the electroless barrier layers (EBLs). It was found that the barrier integrity of the EBLs was NiB 40 nm > NiB 10 nm > CoWP/… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2013
2013
2016
2016

Publication Types

Select...
2

Relationship

1
1

Authors

Journals

citations
Cited by 2 publications
(1 citation statement)
references
References 25 publications
0
1
0
Order By: Relevance
“…[6][7][8] Recently, many researchers have exhibited an interest in the growth of electroless Ni-B films because of the low-cost techniques for the production of micro and nano-electronic technologies. [9][10][11] Electroless Ni film growth on an Ag paste/anodized Al substrate is very difficult, however, because Ni does not react well with Ag due to the large positive heat of formation between Ni and Ag ( H m = +22 kJ/mole). 12 In addition, the anodized Al substrate can be damaged by a strong acid and/or strong alkali solution.…”
Section: Introductionmentioning
confidence: 99%
“…[6][7][8] Recently, many researchers have exhibited an interest in the growth of electroless Ni-B films because of the low-cost techniques for the production of micro and nano-electronic technologies. [9][10][11] Electroless Ni film growth on an Ag paste/anodized Al substrate is very difficult, however, because Ni does not react well with Ag due to the large positive heat of formation between Ni and Ag ( H m = +22 kJ/mole). 12 In addition, the anodized Al substrate can be damaged by a strong acid and/or strong alkali solution.…”
Section: Introductionmentioning
confidence: 99%