High-quality, continuous transition-metal
dichalcogenide (TMD)
thin films with large-area coverage are the prerequisites for practical
device applications. To address the growing demand, here we report
high photoresponse and high detectivity of WS2 nanosheet/Si
p–n heterojunction diodes for potential application in UV–visible
broadband photodetection based on the wafer-scale deposition of WS2 nanosheets. Monolayer equivalent efficiency, i.e., high responsivity
and high detectivity, has been achieved in these devices utilizing
its nanotextured morphology. Nanotexturization in the surface morphology
increased the effective area for absorption as well as contributed
to quantization, leading to superior device performance. RF sputtering
followed by high-temperature annealing in the sulfur-rich environment
has been adopted to achieve stoichiometric WS2 films with
high crystalline quality. The valence band offset for the WS2/Si heterointerface has been determined to be 0.48 ± 0.2 eV,
for the band alignment of heterojunction devices. The fabricated n-WS2/p-Si junction diode displayed excellent rectifying characteristics
(rectification ratio of ∼630) with a low leakage current (∼1
× 10–7 A). The photodiode exhibits a superior
photo-to-dark current ratio (∼1200) and very high photoresponsivity
(>4 A/W) under the reverse bias condition. Moreover, a high detectivity
of ∼4.8 × 1012 Jones with a linear dynamic
range (LDR) of 62 dB at −3 V has also been achieved. A reasonably
fast response time, of approximately a few milliseconds of the fabricated
photodiode, has made them excellent candidates for large-area photodetectors,
operational for the broadband spectral range (300–800 nm).