Ballistic-Mode Plasma-Based Ion Implantation for Surface-Resistivity Modification of Polyimide Film

Park, Byungjae; Kim, Jeehyun; Cho, Moo‐Hyun; Namkung, W.; Kim, Sang Jeong; Yoo, Hyo Yol

doi:10.1109/tps.2012.2190526

Cited by 9 publications

(8 citation statements)

References 18 publications

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“…For this reason, many researchers have used fluid simulations [11,12] or particle-in-cell (PIC) simulations [13][14][15][16][17] to investigate these configurations. Although sheath expansions of many configurations of geometries like sharp edges [11,13] and trenches [12,15] have been studied using simulations, sheath expansion of grid electrode which is very commonly used in basic plasma studies [18] and practical plasma processes [19][20][21][22][23] has not been studied yet.…”

Section: Introductionmentioning

confidence: 99%

Sheath expansion of two-dimensional grid electrodes subjected to short pulses of negative high-voltage

Yi¹,

Lee²,

Park³

et al. 2015

Plasma Sources Sci. Technol.

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Sheath expansion was investigated for two-dimensional (2D) grid electrodes which consist of a periodic array of cylindrical electrodes when short pulses of negative high-voltage were applied to the electrodes immersed in plasmas. In the sheath expansion model, a geometric function which describes the electrode system is crucial to numerically calculate the temporal evolution of a sheath boundary. In this paper, the 2D geometric function of grid electrodes was obtained by using XOOPIC (particle-in-cell) simulation. When the ratio between the diameter of cylindrical electrodes and grid spacing is fixed, we found that the geometric functions and the temporal evolutions of the sheath boundary for grid electrodes are identical in normalized coordinates. The numerical calculation results of the temporal evolutions of the sheath boundary showed reasonable agreements with the experimental measurements carried out in argon plasmas produced by hot filament discharges with neutral gas pressure of ∼0.4 mTorr and plasma density in the order of 10 10 cm −3 in a multi-dipole device.

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Section: Introductionmentioning

confidence: 99%

Sheath expansion of two-dimensional grid electrodes subjected to short pulses of negative high-voltage

Yi¹,

Lee²,

Park³

et al. 2015

Plasma Sources Sci. Technol.

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“…For deeper traps, more energy is needed to detrap the carriers, which means more charges are trapped in samples. Only the near surface region with the depth about ~90 nm of the material has been modified by reactive groups during plasma treatment [34]. Thus, the trap distribution modification mainly occurs in the near surface region, by introducing groups contained oxygen and nitrogen.…”

Section: Modification Mechanismmentioning

confidence: 99%

Failure Mechanism and Property Modification of Insulation Material Used in Inverter-Fed Motors

Yang¹,

Wu²

2020

Modern Applications of Electrostatics and Dielectrics

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The insulation system of inverter-fed motors is subjected to repetitive impulse voltages, which are generated by pulse width modulation (PWM) converters, and is expected to withstand partial discharge (PD) activity during service. PD-induced dielectric breakdown becomes one of the most important reasons for premature failures of motor insulation. Therefore, the dielectric properties of insulation material used in inverter-fed motors need to be improved to meet the requirement for rapid development of applications. Many approaches have been proposed to improve dielectric properties of insulation material used in inverter-fed motors. In this chapter, we will discuss the failure mechanism, modification approaches, and their effects on dielectric properties of insulation material of inverter-fed motors.

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“…In many cases, the ion distributions near the surface of electrodes were mainly studied for industrial applications such as the modification of the surface properties of materials using energetic ions. However, for grid electrodes, which are frequently used in basic plasma research [17] and industrial plasma applications [14,15,18,19], ion distributions in the entire region of an expanding sheath are important for investigating the characteristics of sheath expansion [20] and pseudo wave generation [17].…”

Section: Introductionmentioning

confidence: 99%

“…In applications of plasma immersion ion implantation [3] for insulating materials, grid electrodes have been used to suppress charge accumulations on the surface of the insulating materials during the process [15,18,19]. In some cases, insulating materials were located inside the expanded sheath of the grid electrodes [15,18] and the number and energy of implanted ions in the surface of the insulating material are determined by the ion distribution inside the expanded sheath of the grid electrodes.…”

Section: Introductionmentioning

confidence: 99%

“…In some cases, insulating materials were located inside the expanded sheath of the grid electrodes [15,18] and the number and energy of implanted ions in the surface of the insulating material are determined by the ion distribution inside the expanded sheath of the grid electrodes. In other cases, insulating materials were located outside the expanded sheath of the grid electrodes [19] and high-energy pseudowaves were used as an ion beam whose properties depend on the ion distribution inside the expanding sheath of the grid electrodes [17]. For these applications, the ion distribution in expanding sheaths of grid electrodes are crucial for estimating the number and energy of implanted ions in the surface of processed insulating materials.…”

Section: Introductionmentioning

confidence: 99%

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Normalized ion distribution function in expanding sheaths of 2D grid electrodes

Namkung²,

Cho

2016

Plasma Sources Sci. Technol.

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Ion distributions in expanding collisionless sheaths of two-dimensional (2D) grid electrodes were studied by using XOOPIC (particle-in-cell) simulations when short pulses of negative high-voltage were applied to electrodes immersed in plasmas. 2D grid electrodes consist of a periodic array of cylindrical electrodes, and the opening ratio of the grid electrodes is defined by the ratio of the spacing between cylindrical electrodes to the periodic length of the grid electrodes. In this paper, we introduce a normalized ion distribution function in normalized coordinates, and it is shown by simulation that the normalized ion distribution function depends only on the opening ratio of the grid electrodes. When the opening ratio of the grid electrodes is fixed, the ion distribution in expanding sheaths can be easily found in various conditions using only a single run of a PIC simulation, and the computation time can be significantly reduced.

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Ballistic-Mode Plasma-Based Ion Implantation for Surface-Resistivity Modification of Polyimide Film

Cited by 9 publications

References 18 publications

Sheath expansion of two-dimensional grid electrodes subjected to short pulses of negative high-voltage

Sheath expansion of two-dimensional grid electrodes subjected to short pulses of negative high-voltage

Failure Mechanism and Property Modification of Insulation Material Used in Inverter-Fed Motors

Normalized ion distribution function in expanding sheaths of 2D grid electrodes

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