“…A wide transmission range is one of the most important considerations in determining the wavelength to reach the DUV region. Generally, it can be considered from the following items: the 2p orbits of B and O in borates are far away from the bottom of the conduction band (CB) and the top of the valence band (VB), so they have high transmittance in a wide wavelength range, which is also one of the important reasons why borates can be used as UV/DUV materials. , Additionally, the absorption edge will also be blue-shifted by introducing the F element with the largest electronegativity, such as AB 4 O 6 F (A = NH 4 , Na, Rb, and Cs) and MB 5 O 7 F 3 (M = Mg, Ca, and Sr) reported by Pan’s group. – As for cations, alkali/alkaline earth metals attract much attention because they do not have d–d or f–f electronic transitions, which is beneficial to the ability of transmission in the DUV region, – such as the short cutoff edge of LiB 3 O 5 (155 nm), CsB 3 O 5 (169 nm), Sr 2 Be 2 B 2 O 7 (165 nm), and Ba 2 Mg(BO 3 ) 2 (187 nm) et al Moreover, the unfavorable d–d or f–f electronic transitions are absent from trivalent rare-earth cations RE 3+ (RE = Sc, Y, and Lu) with closed-shell electron configurations, which is advantageous to broaden the transparency window of crystals. – The above advantages inspire us to design a compound combining them together with favorable optical properties. However, there have been only 33 cases of reported anhydrous rare-earth borate fluorides so far.…”