B5.3 - High-Resolution Laser-Vibrometer Microscopy

Novel techniques for laser doppler vibrometry for vibrating shiny and mirror surfaces

“…Among the methods discussed so far, LDV has some advantages for dynamics characterization in MEMS testing, as shown in Table 2.1. Measurements using LDV have high axial [51] and lateral resolutions [15]. The lateral resolution can achieve down to picometer resolution [41].…”