B114 A Molecular Dynamics Study on Molecular Scale Structure in the Liquid and mass transport Droperties in the vicinity of SiO_2-water/IPA interfaces

Abstract

Mass transport in liquids contacting solid surfaces exhibits cemplicateCl characteristics and an essential understanding of their mechanism is of critica ［importance ． The interfaces between SlO2 and water or IPA ( iso− propyl alcohol )are typical system in the semiconductor industry ， and the molecular − scale mass transport is being required to improve the lithography and cleaning process ． In the present study ， molecular dynamics simulations of SiO2 − water and SiO2−IPA interfaces have been pe 曲 ed in order to investigate molecular −scale stucture ofthe adsorption ！ ayers ofliquid molecules and molecular transport eharacteristics ． As typical terminations of SiO2 surfaces ， H − and OH − te inated ones were used and behaviors Qfliquid water and IPA molecules in the vicinity ofthese surfaces were anal yzed ．