<b>
                     <i>In situ</i>
                  </b> thin-film texture determination

Litvinov, Dmitri; O’Donnell, Thomas; Clarke, Roy

doi:10.1063/1.369519

Cited by 38 publications

(36 citation statements)

References 6 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Ideal fiber texture without dispersion in the out-of-plane axis As mentioned in the previous section, for a random polycrystalline film without any preferred grain alignment, the reciprocal space structure consists of a set of concentric spherical shells (Litvinov et al 1999a). For a fiber texture, the film has a preferred orientation normal to the surface.…”

Section: Diffraction Space Characteristics Of Textured Filmsmentioning

confidence: 99%

“…Based on Andrieu and Frechard's (1996) work, Litvinov et al (1999a) presented a kinematic formulism for RHEED patterns for fiber-texture films. Details of the derivation can be found in their papers.…”

Section: Basic Formulism Of Rheed From Textured Filmsmentioning

confidence: 99%

“…More quantitative treatments of RHEED diffraction patterns from polycrystalline films were carried out in the work of Andrieu and Frechard (1996) in France and the work of Litvinov et al (1999a) in Michigan. Andrieu and Frechard laid out the key crystallography information of textured films that can be obtained from RHEED patterns such as the average angle of the texture axis with respect to the surface normal and the angular width of the distribution of this angle about its average value.…”

Section: Rheed Transmission Patterns From Textured Filmsmentioning

confidence: 99%

See 2 more Smart Citations

RHEED Transmission Mode and RHEED Pole Figure

Wang

2013

RHEED Transmission Mode and Pole Figures

View full text Add to dashboard Cite

In the last chapter, we presented the principles of x-ray diffraction and the construction of a pole figure, particularly the pole figure constructed from the diffraction patterns obtained by an area detector. In this chapter, we describe the similarities and differences between reflection high-energy electron diffraction (RHEED) transmission mode and x-ray diffraction. Detailed descriptions of the diffraction space characteristics of RHEED transmission for a variety of crystal textures are given. We discuss kinematic simulations of RHEED patterns and the construction of RHEED pole figures from RHEED patterns. The relationship between RHEED pole figures and the orientation distribution function of biaxial texture is presented with examples. X-Ray Diffraction vs RHEEDMost thin films grown by common deposition techniques such as physical vapor deposition or chemical vapor deposition are not single crystals. Single crystals are grown only under specific favorable conditions. A major technique used for texture structure characterization is the x-ray pole figure. The typical photon energy used in x-ray diffraction is 8,048 eV (Cu K α ), while tens of kiloelectron volt electrons are used for reflection high-energy electron diffraction (RHEED). Here we discuss the similarities and differences between x-ray diffraction and the RHEED transmission mode. Strength of scattering cross sectionThe scattering cross section for electrons in solids is orders of magnitude higher than that for x-rays. For example, the total elastic electron scattering from Mo at 10 keV incident electron energy is on the order of 10 −19 m 2 (Browning 1991). In the energy range of 1-100 keV, the cross-section scales as E −0.5 in the low-energy regime and E −1 and Z 1.33 in the high-energy regime, where E is in units of keV and Z is the atomic number of an atom. For 1 keV photon, the total photon cross section from Pb is on the order of 10 −22 m 2 (Hubbell et al. 1975). The stronger scattering cross section of electrons provides a stronger electron diffraction signal from ultrathin films and nanostructures.

show abstract

Section: Diffraction Space Characteristics Of Textured Filmsmentioning

confidence: 99%

Section: Basic Formulism Of Rheed From Textured Filmsmentioning

confidence: 99%

Section: Rheed Transmission Patterns From Textured Filmsmentioning

confidence: 99%

See 1 more Smart Citation

RHEED Transmission Mode and RHEED Pole Figure

Wang

2013

RHEED Transmission Mode and Pole Figures

View full text Add to dashboard Cite

show abstract

“…Ultimately, we are interested in the scattering transition probabilities, which are derived from the scattering amplitudes as P͑kê →kn ͒ϭ͉A͑ kê →kn ͉͒ 2 . ͑9͒…”

Section: B Random Phase Approximationmentioning

confidence: 99%

“…Reflection high-energy electron diffraction ͑RHEED͒ is a measurement technique which is compatible with the deposition conditions of many high vacuum deposition techniques ͑e.g., sputter deposition, molecular beam epitaxy͒ but is typically used only to monitor surface roughness and surface structure during the growth of single crystal materials because quantitative interpretation of the RHEED intensities is difficult. Recently, models which are valid in the limit of very large grains 1,2 have been developed to treat grain orientation distributions in polycrystalline materials and have been used to determine out-of-plane texture for a CoCr alloy. 3 We have developed a fast algorithm able to calculate RHEED intensities from well-textured, narrow in-plane oriented, and small-grained polycrystalline films.…”

Section: Introductionmentioning

confidence: 99%

Reflection high-energy electron diffraction analysis of polycrystalline films with grain size and orientation distributions

Hartman

Brewer

Atwater

2002

Journal of Applied Physics

View full text Add to dashboard Cite

We report a computationally efficient algorithm to calculate reflection high-energy electron diffraction ͑RHEED͒ intensities from well-textured, small-grained polycrystalline films in the kinematic limit. We also show how the intensity maps of the spots in a RHEED pattern from such a film can be quantitatively analyzed to determine the film's average grain size, as well as its in-plane orientation and texture distributions. We find that the in-plane orientation and texture distribution widths of these films can be determined to within 1 degree and that the average lateral grain size can be measured to within a fraction of a nanometer after suitable calibration of our technique.

show abstract