The strongly increasing demand for nano-and microelectronics calls for new and environmentally benign reaction pathways for the preparation of one of the most important substrates in the production of semiconductor materials: Si 2 Cl 6 . We present a comprehensive study of the opportunities and challenges for the selective electrochemical formation of higher halo-functionalized silanes to Si 2 Cl 6 achieved by cyclic voltammetry measurements and electrochemical synthesis. Cathodic dehalo-dimeriza-tion reaction of SiCl 4 and the approach to halogen exchange for better substrate reduction are envisioned. An anodic halide-free dimerization pathway by dehydrogenation of HSiCl 3 is investigated, including Lewis acid activation of the SiÀ H bond. In addition, tertiary amine-driven, Benkeser-like in-situ formation of a SiCl 3 À anion was tested as well. The target molecule Si 2 Cl 6 is strongly promoted to direct electro-conversions making the anodic and cathodic electrosynthesis very challenging.