“…In most reports, α-Ga 2 O 3 and α-(Al x Ga 1−x ) 2 O 3 is grown on the basal c-plane of α-Al 2 O 3 [9, 17-22, 24, 28, 29, 34, 35]. Lately, also the pyramidal r-plane [14,31,[36][37][38][39][40] as well as the prismatic a- [14,27,32,41,42] and m-plane [26, www.mrs.org/jmr © The Author(s) 2021 2 Invited Paper 33,[42][43][44] of sapphire were utilized as epitaxial plane for the material. Especially the last one became interesting for potential device applications due to doped m-plane α-Ga 2 O 3 exhibiting up to three times higher mobility than similar layers on c-plane sapphire [26].…”