Axial Distribution of Plasma Properties in a Hollow Cathode Plasma Discharge

Nakamura, Hakobu; Watanabe, Masayuki

doi:10.1585/pfr.16.1206101

Cited by 3 publications

(1 citation statement)

References 17 publications

(14 reference statements)

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“…For consistency, in all estimates we use the values of the secondary emission coefficients Γ = 0.3 and γ = 0.15. The electron temperature in the negative glow plasma is taken as kT e = 5 eV [39]. The average energy expended for one act of ionization V av is calculated from the condition of establishing the self-sustained discharge (see equation ( 8)).…”

Section: Theoretical Model For Hollow-cathode Discharge and Interpret...mentioning

confidence: 99%

Operating modes in a low-pressure glow discharge with hollow cathode

Korolev¹,

Landl²,

Франц³

et al. 2022

Plasma Sources Sci. Technol.

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The paper deals with the investigations of the discharge in hydrogen in the conditions close to that for the trigger units of the pseudospark switches. The following modes of discharge sustaining are classified: the Townsend discharge, the suppressed glow discharge with hollow cathode, the intermediate mode of the gradual transition from the suppressed discharge to the ordinary glow discharge, and the ordinary discharge in which the negative glow plasma occupies the whole depth of the cathode cavity. As applied to the ordinary discharge, the theoretical model that offers a possibility to estimate the negative glow parameters is developed. In the current range (1.6–10) mA the electron densities in the negative glow region are (1.7–8.7) 108cm–3. The interpretation for the mechanism of the current passage to the anode is also proposed based on the model. In particular, the explanation of the fact that at a low discharge current the region of the positive column plasma near the flat anode appears is given.

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Section: Theoretical Model For Hollow-cathode Discharge and Interpret...mentioning

confidence: 99%

Operating modes in a low-pressure glow discharge with hollow cathode

Korolev¹,

Landl²,

Франц³

et al. 2022

Plasma Sources Sci. Technol.

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Improved dry sliding wear behavior of TA1 titanium by low-temperature plasma nitriding by CCPN method

Liu,

Wang,

et al. 2024

Vacuum

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Electrical and optical characterization of a cage discharge plasma device for surface processing

Bakry,

Garamoon,

Nossair

et al. 2023

Physics of Fluids

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In this study, we developed a cage discharge plasma device, which generates a uniformly axially elongated negative glow plasma. The device is equipped with six stainless steel rod-shaped cathode electrodes and anodes distributed consecutively along the discharge chamber. Electron temperature (Te) and electron energy distribution functions (EEDFs) were measured using single and double electric probes under different experimental conditions. Single-probe measurements confirmed the existence of high- and low-energy groups of electrons. For both of these groups, Te peaks near the edge of the electrode and decreases sharply as the electrons move radially toward the edge of the negative glow region. Optical emission spectroscopy (OES) was used to calculate Te by applying the intensity ratio of the helium emission lines. The calculated Te using OES is generally in agreement with Te of the high-energy group measured by a single probe. On the other hand, the Te measured by the double probe was mostly consistent with Te of the low-energy group measured by the single probe. Ion densities measured with single and dual probes increased sharply near the cathode until reaching a point approximating the thickness of the cathode sheath and then increased slightly to reach a maximum value (∼1.6 × 109 cm−3) in the center of the discharge tube. EEDFs have been determined at different gas pressures, discharge currents, and radial positions, using single-probe technique. The density of the low-energy group increases, and the peaks move to lower energies in the direction of the center of the tube.

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Axial Distribution of Plasma Properties in a Hollow Cathode Plasma Discharge

Cited by 3 publications

References 17 publications

Operating modes in a low-pressure glow discharge with hollow cathode

Operating modes in a low-pressure glow discharge with hollow cathode

Improved dry sliding wear behavior of TA1 titanium by low-temperature plasma nitriding by CCPN method

Electrical and optical characterization of a cage discharge plasma device for surface processing

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