1980
DOI: 10.1364/ao.19.000930
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Average power limitations in high-repetition-rate pulsed gas lasers at 106 and 16 μm

Abstract: Processes resulting in average power limitations in high-repetition-rate pulsed lasers are studied. The description and performance of a CO(2) laser with an average power up to 10 kW as well as of an optically pumped CF(4) laser are given.

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Cited by 21 publications
(7 citation statements)
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“…To our knowledge the reported maximum output average power of tunable TEA CO 2 laser up to now is 1.2 kW [4]. Based on our recently made 3.6 kW TEA CO 2 laser, the laser tunability has been demonstrated.…”
Section: Introductionmentioning
confidence: 86%
“…To our knowledge the reported maximum output average power of tunable TEA CO 2 laser up to now is 1.2 kW [4]. Based on our recently made 3.6 kW TEA CO 2 laser, the laser tunability has been demonstrated.…”
Section: Introductionmentioning
confidence: 86%
“…Meanwhile, the shock waves from pulsed discharges, particularly high-current discharges at elevated pressures, can significantly affect both the environment and the area of the discharge. In particular, it has been shown [12] that the use of plasma electrodes in the volume discharge of a CO 2 laser shock wave heats the volume of the laser and limits the frequency of the generated laser radiation. The interval between pulses had to be increased [13,14]-shock waves from pulsed discharges limit the use of the volume discharge as a light source [15][16][17][18].…”
Section: Introductionmentioning
confidence: 99%
“…3 In the past two decades, the flow field developing process after discharge in the chamber and its influence to the next discharge have attracted the attentions of scientists and Engineers for the increasing high-repetitive-rate and stable-discharge demands of repetitively pulsed gas laser application, especially the EUV Lithography application. 4,5,10 The schlieren 6,10 , shadowgraph 11 , and interferometry 5,7 were all applied, and the images of three kinds of shock waves (the longitudinal shock waves in the gas flow direction, the transversal shock waves between the electrodes and the transversal shock waves between optics) were obtained 7,11 .…”
Section: Introductionmentioning
confidence: 99%