Automatic Recording Laser Interferometer for Line Standards up to 2 m

Matsumoto, Hirokazu; Seino, Shoichi; Sakurai, Yoshimasa

doi:10.1088/0026-1394/16/4/003

Cited by 12 publications

(3 citation statements)

References 12 publications

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“…Secondly, the order of the interference fringe is determined by the same measurement by the 14.9 GHz repetition frequency of the comb. Figure 7 shows an outline of the automatic processing of interference fringes for determining the length [7,8]. First, the photo-detection signal of the interference fringes is squared, and then it is filtered by a low-path filter.…”

Section: The Principle Of Absolute Measurementmentioning

confidence: 99%

Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer

Matsumoto¹,

Takamasu²

2015

Int. J. Automation Technol.

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The optical frequency comb has a short pulse, broad spectra, many spectral lines, and high temporal coherency. In this paper, a new absolute length-measuring technique with a high resolution of 0.05 μm is developed by using the temporal-coherence interferometry of the optical comb. A new fiber Fabry-Perot etalon (etalon) of a free spectral range with a frequency of 15 GHz is developed to improve fine positioning in space, so a short translation stage of up to a 10 mm movement is realized for various ranges of length. Moreover, the interference fringe peak is automatically detected by developing a new analog electrical circuit. The ambiguity of the interference-fringe orders is determined by using the etalon at a frequency 14.9 GHz within a time of 1 second for various length ranges.

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Section: The Principle Of Absolute Measurementmentioning

confidence: 99%

Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer

Matsumoto¹,

Takamasu²

2015

Int. J. Automation Technol.

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“…Figure 5 shows, in schematic form, the NRLM automatic fringe-counting interferometer designed to measure line standards of up to 2 m based on Eppenstein's principle [6], which is used for measuring gauge blocks by the new method.…”

Section: Fringe-counting Interferometermentioning

confidence: 99%

Measurements of long gauge blocks using a fringe-counting interferometer and subgauge blocks with lines

Fujii¹,

Matsumoto²,

Fujima³

1996

Metrologia

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A new method for measuring long gauge blocks using a fringe-counting interferometer with a 633 nm wavelength-stabilized He-Ne laser is described. Two subgauge blocks, which have V-type graduation lines covered with glass plates, are optically contacted with both sides of a long gauge block. They are handled with bare hands and the surfaces of the glass plates are wiped with a paper towel after the optical wringing procedure. Using the National Research Laboratory of Metrology 2 m line standard automatic measuring machine, several gauge blocks up to 1 m long are measured with a repeatability less than 0,1 m in standard deviation. A comparison between the lengths of gauge blocks measured by the new method and by the conventional excess fractions method is made. The results show that the length of gauge blocks up to 1 m can be determined with an expanded uncertainty 0,3 m, corresponding to a level of confidence of about 95 %.

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“…An indication of the appreciation of line scales is that in its 11th meeting in 2003, the Consultative Committee for Length (CCL) decided to add line scales as a key comparison topic of the Mutual Recognition Arrangement (CIPM MRA). Earlier highest-accuracy line scale interferometers used scanning mirror or slit photo electric microscopes for line position detection and were mainly meant for measurements of 1 m prototypes and similar scales [1][2][3][4]. Recently several new designs have been designed for dissemination of the length unit metre by national metrology institutes [5][6][7][8] or by industry for quality control of production, e.g.…”

Section: Introductionmentioning

confidence: 99%

MIKES fibre-coupled differential dynamic line scale interferometer

Lassila

2012

Meas. Sci. Technol.

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An instrument developed for high accuracy calibration of line scales up to 1.16 m is described. The instrument is based on an earlier design from the early 1990s. Since then, in order to improve performance and achieve smaller uncertainty, large portions of software, mechanics and optics have been redesigned and several uncertainty components better characterized. The software has been developed to be less sensitive to imperfections of the line mark. In order to decrease noise and deformation coupling in interferometric measurement, the interferometer operating principle has been designed to use a fibre-coupled laser light, interferometer optics have been improved for better phase adjustment and detection and a differential interferometer principle has been taken into use. In order to minimize the effects due to deformations of the stone table rail with moving heavy carriage, a separate bed has been designed under line scale supports. The bed with fixed differential reflector prevents deformations of the table from affecting the line scale versus interferometer position. The main properties of the instrument are described and an uncertainty estimate is presented. The expanded uncertainty (k = 2) for line distance calibration of high-quality low-thermal-expansion line scale is U = [(4.5 nm)2 + (43 × 10−9 L)2]½, where L is the measured length. The results of international comparisons support the uncertainty estimate.

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Automatic Recording Laser Interferometer for Line Standards up to 2 m

Cited by 12 publications

References 12 publications

Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer

Automatic Recording Absolute Length-Measuring System with Fast Optical-Comb Fiber Interferometer

Measurements of long gauge blocks using a fringe-counting interferometer and subgauge blocks with lines

MIKES fibre-coupled differential dynamic line scale interferometer

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