2021 IEEE European Test Symposium (ETS) 2021
DOI: 10.1109/ets50041.2021.9465457
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Automatic Inspection for Wafer Defect Pattern Recognition with Unsupervised Clustering

Katherine Shu-Min Li
1
,
Leon Li-Yang Chen2,
Ken Chau-Cheung Cheng3
et al.
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