We have developed technologies which inspect the shape of solder bumps. The bumps are used to solder an LSI to a printed wiring board in high‐speed workstations. The inspection system developed can measure the height, diameter, and brightness of bumps at very high speed. The bump height is measured using triangulation, in which a laser beam scans the bumps, and reflected light is detected with a position sensitive detector (PSD). The diameter and the brightness are measured using a microscope and a CCD camera. The detected results are compared with CAD data. A height measurement accuracy of ±3 μm and a diameter measurement accuracy of ±5 μm were obtained. Practical inspection systems using these techniques have been created and they can inspect 2000 bumps in 60 seconds. © 2000 Scripta Technica, Syst Comp Jpn, 31(2): 94–102, 2000