2007
DOI: 10.1016/j.ultramic.2006.11.007
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Automated three-dimensional X-ray analysis using a dual-beam FIB

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Cited by 84 publications
(71 citation statements)
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“…From the series of data created in this way, a 3D volume model can be reconstructed. The fully automated 3D-EDXS method [36] is performed using the Nanolab Nova200 DB-FIB (FEI) and the Genesis EDXS detector (EDAX). The DB-FIB is operated with an ion beam current of 1 nA at 30 kV acceleration voltage during milling, and with an electron beam current of 2.2 nA at 15 kV acceleration voltage during SEM and EDXS analysis.…”
Section: Methodsmentioning
confidence: 99%
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“…From the series of data created in this way, a 3D volume model can be reconstructed. The fully automated 3D-EDXS method [36] is performed using the Nanolab Nova200 DB-FIB (FEI) and the Genesis EDXS detector (EDAX). The DB-FIB is operated with an ion beam current of 1 nA at 30 kV acceleration voltage during milling, and with an electron beam current of 2.2 nA at 15 kV acceleration voltage during SEM and EDXS analysis.…”
Section: Methodsmentioning
confidence: 99%
“…The right part of this image shows a very homogeneous distribution of precipitates with almost identical diameter, which is the result of a two-dimensional projection of a three-dimensional array of tubular precipitates in the normal to the growth direction of the precipitates. Figure 2 shows a corresponding microstructure reproduction performed with sequential sectioning using the FIB (focused ion beam) technique [36].…”
Section: Precipitate Morphologymentioning
confidence: 99%
“…A freshly milled section was obtained perpendicular to the surface. The electron beam images the section with an angle of 36°and the resulting take-off angle for the EDS detector is 27° [6]. During the 3-D acquisition, layers were etched away sequentially through the whole volume.…”
Section: -D Eds By Fib/semmentioning
confidence: 99%
“…Using a focused ion beam (FIB) combined with SEM/EDS, 2-D mapping can be extended to three dimensions: using an FIB to sequentially mill away thin layers of material through the volume of interest, each section is characterized with SEM images and EDS maps. This technique is called 3-D EDS by FIB/ SEM [5,6].…”
Section: Introductionmentioning
confidence: 99%
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