Automated Process Initialization of Laser Surface Structuring Processes by Inline Process Metrology

Schmitt, Robert; Mallmann, Guilherme; Winands, Kai; Pothen, Mario

doi:10.1016/j.phpro.2013.03.163

Cited by 7 publications

(5 citation statements)

References 7 publications

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“…This method is however suitable for two special cases: an offline roughness measurement either before or after structuring and an online depth measurement of structures with a sufficiently large flat surface, e.g., cavities. 33 Further successful applications of a coaxially integrated OCT system include the online distance control, ensuring the constant focus position. 34 Although various approaches for process monitoring in USP laser micromachining have been investigated, none of them have been able to reliably and without limitations detect or predict the quality of the resulting structure yet.…”

Section: Introductionmentioning

confidence: 99%

“…Therefore, the lateral resolution of an online measurement is too low when machining is performed at typical scanning speeds. This method is however suitable for two special cases: an offline roughness measurement either before or after structuring and an online depth measurement of structures with a sufficiently large flat surface, e.g., cavities 33 …”

Section: Introductionmentioning

confidence: 99%

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Real-time defect detection through lateral monitoring of secondary process emissions during ultrashort pulse laser microstructuring

Zuric

Brenner

2022

Opt. Eng.

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Ultrashort pulse (USP) laser machining is characterized both by high spatial precisions as well as rapid changes during the processing. Laser pulses with durations of only a few hundred femtoseconds are deflected over the workpiece surfaces at speeds of up to 10 m/s. Due to the tradeoff between the precision and the productivity, USP laser machining processes can last up to multiple days. Online defect detection and their elimination is therefore essential in order to increase the stability of the established processing as well as accelerate the process development. However, monitoring of USP laser micromachining represents a great challenge because of both the high requirements for the spatial accuracy and the cost-intensive sensor integration. In the scope of this work, this challenge is tackled by laterally collecting the optical process emissions with photodiodes for different wavelength ranges. The monitoring system, which had previously been developed and had undergone initial testing, is further evaluated in this work. These most recent analyses aim to investigate the detection of the surface roughness prior to as well as its evolution during the USP laser machining. In addition, successful localization of defects induced on the workpiece surface by the USP processing is shown. Furthermore, the possibility of online process control was demonstrated by transferring the analysis algorithms to a field programmable gate array (FPGA) and implementing a real-time defect detection and feedback to the user. A decision for each data point is generated within the 10-μs cycle of the data acquisition. Furthermore, the system can be programmed flexibly and thus expanded to include real-time data analyses for further applications as well as process control. In conclusion, the analyses of laterally recorded secondary emissions have shown great potential for differentiating between surface roughness above 1 μm as well as tracking changes for every pass over the surface and localizing defects during the USP-laser machining. © The Authors. Published by SPIE under a Creative Commons Attribution 4.0 International License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

Real-time defect detection through lateral monitoring of secondary process emissions during ultrashort pulse laser microstructuring

Zuric

Brenner

2022

Opt. Eng.

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“…Positional accuracy is generally achieved by carrying out one or more of these processes: design, following precision engineering principles; calibration, requiring steps, such as kinematic modelling, error identification and error compensation; and compensation for the target's path (or trajectory), requiring in-process measurement of the position of the target while the operation is taking place (i.e. real-time compensation) (Bosmans et al, 2017;Buice, 2018;Karim, Piano, Leach, Branson, et al, 2018;Schmitt et al, 2013;Schmitt et al, 2012;Schwenke et al, 2008;Ruijl, 2001;Ramesh et al, 2000;Sartori & Zhang, 1995). Real-time compensation using in-process metrology has been playing an increasingly important role in recent years in the process chain for manufacturing of precision workpieces with complex shapes and/or tight tolerances (Schmitt et al, 2012;Schmitt et al, 2013).…”

Section: Introductionmentioning

confidence: 99%

“…real-time compensation) (Bosmans et al, 2017;Buice, 2018;Karim, Piano, Leach, Branson, et al, 2018;Schmitt et al, 2013;Schmitt et al, 2012;Schwenke et al, 2008;Ruijl, 2001;Ramesh et al, 2000;Sartori & Zhang, 1995). Real-time compensation using in-process metrology has been playing an increasingly important role in recent years in the process chain for manufacturing of precision workpieces with complex shapes and/or tight tolerances (Schmitt et al, 2012;Schmitt et al, 2013). Beyond the task of quality control for workpieces, in-process metrology has proven effective for manufacturing process control, by allowing optimisation of the process and the machine tool settings (Gao et al, 2019;Hansen et al, 2006).…”

Section: Introductionmentioning

confidence: 99%

Real-time target alignment system for high-power high-repetition rate laser operations using a five degree-of-freedom hybrid mechanism

Karim

Piano

Branson

et al. 2020

International Journal of Control

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“…Some metrology organizations have developed some metrology information management system [1][2][3][4]. The oceanic standard metrology center designed and realized a management system to deal with its metrology achievements.…”

Section: Introductionmentioning

confidence: 99%

Metrology Information System for Management and Field Scene Detection

Qiao

Liang

Tang

2014

AMR

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In order to deal with the field metrology, this paper proposed an information management system which contains daily work management section, human resource section, data management section, auto-reminding section and portable device. It combines the human resource management, equipment management, data processing and filed detection and embodies them in one system located in office and the other one in field. As an information system, it ensures the security and reliability of detection data.

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Automated Process Initialization of Laser Surface Structuring Processes by Inline Process Metrology

Cited by 7 publications

References 7 publications

Real-time defect detection through lateral monitoring of secondary process emissions during ultrashort pulse laser microstructuring

Real-time defect detection through lateral monitoring of secondary process emissions during ultrashort pulse laser microstructuring

Real-time target alignment system for high-power high-repetition rate laser operations using a five degree-of-freedom hybrid mechanism

Metrology Information System for Management and Field Scene Detection

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