2010 8th IEEE International Conference on Industrial Informatics 2010
DOI: 10.1109/indin.2010.5549467
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Automated control solution for contaminant dispersal in a cleanroom

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“…The cleanrooms with FFU (Fan Filter Unit) systems have been broadly used in many applications to fulfill the cleanliness requirement during the fabrication process in a variety of high-precision industries [1][2].With the cleanrooms' technology development,the fans and filters can be combined together to form self-powered purification FFU equipment as a cleaner works has been widely used in a variety of purification projects [3]. For the large clean projects, which often use multi-cleanrooms,which have thousands of FFU motors.These need have remote mointoring system with high efficiency to achieve the FFU motors remote mointoring , while the traditional mointoring control existence some defects,such as complex wiring, cabling problems, high cost,control network complexity, poor reliability, anti-interference ability and so on, which is difficult to meet the needs of modern purification projects.…”
Section: Introductionmentioning
confidence: 99%
“…The cleanrooms with FFU (Fan Filter Unit) systems have been broadly used in many applications to fulfill the cleanliness requirement during the fabrication process in a variety of high-precision industries [1][2].With the cleanrooms' technology development,the fans and filters can be combined together to form self-powered purification FFU equipment as a cleaner works has been widely used in a variety of purification projects [3]. For the large clean projects, which often use multi-cleanrooms,which have thousands of FFU motors.These need have remote mointoring system with high efficiency to achieve the FFU motors remote mointoring , while the traditional mointoring control existence some defects,such as complex wiring, cabling problems, high cost,control network complexity, poor reliability, anti-interference ability and so on, which is difficult to meet the needs of modern purification projects.…”
Section: Introductionmentioning
confidence: 99%