Attenuated Total Reflection Studies of Honeycomb Nanoporous GaN Thin Films

Abstract

In this work, room temperature polarized infrared attenuated total reflection (ATR) spectroscopy was employed to characterize a nanoporous GaN thin film with honeycomb structure. Prominent ATR dips due to the surface phonon polariton (SPP) and guided waves of nanoporous GaN thin film were observed. Both SPP resonance and guided waves were detected in the p-polarized ATR spectrum while only guided waves were detected in the s-polarized ATR spectrum. The ATR results were compared with the theoretical spectra generated by means of effective medium model. Good agreement was achieved between the measured and theoretical spectra. Finally, the thickness and porosity of porous layer were determined unambiguously.