Atomistic understanding of the subsurface damage mechanism of silicon (100) during the secondary nano-scratching processing

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Atomistic understanding of the subsurface damage mechanism of silicon (100) during the secondary nano-scratching processing

Cited by 7 publications

References 38 publications

Deformation and machining mechanism of nanocrystalline NiCoCrFe high entropy alloys

Deformation and machining mechanism of nanocrystalline NiCoCrFe high entropy alloys

Microstructure evolution of Si nanoparticles during the melting process: Insights from molecular dynamics simulation

Dislocation slip mechanism and prediction method during the ultra-precision grinding process of monocrystalline silicon

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