2010
DOI: 10.1016/j.actamat.2010.06.023
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Atomistic simulation of hillock growth

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Cited by 20 publications
(13 citation statements)
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References 20 publications
(25 reference statements)
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“…In the case of strained layers, the shape instability leads either to equilibrium-shaped hole or to equilibrium shaped hillock formation [22][23][24] depending on the competing relaxation mechanism. While the formation of hillocks as a consequence of stress relaxation is observed for various thin film materials 14,19,23,[25][26][27][28] , the formation of equilibrium shaped holes has been affirmed recently both experimentally and by kinetic Monte Carlo simulations 6 . However, the nature and transition between these two competing instability mechanisms is far from being fully understood.…”
Section: Introductionmentioning
confidence: 99%
See 1 more Smart Citation
“…In the case of strained layers, the shape instability leads either to equilibrium-shaped hole or to equilibrium shaped hillock formation [22][23][24] depending on the competing relaxation mechanism. While the formation of hillocks as a consequence of stress relaxation is observed for various thin film materials 14,19,23,[25][26][27][28] , the formation of equilibrium shaped holes has been affirmed recently both experimentally and by kinetic Monte Carlo simulations 6 . However, the nature and transition between these two competing instability mechanisms is far from being fully understood.…”
Section: Introductionmentioning
confidence: 99%
“…Their stability has been subjected to research under several aspects: thermodynamics and kinetics [1][2][3] , mass transport via surface diffusion 1,4,5 , impact of surface energy anisotropies [6][7][8][9] , fingering instabilities 7,10,11 , Ostwald ripening of islands 12 , hole pattern 13 and hillock formation [14][15][16][17][18][19] .Most of the fundamental theoretical work has been carried out by Srolovitz and Safran who developed a complete stability theory for thin films covering kinetics 20 and energetics 21 . In the case of strained layers, the shape instability leads either to equilibrium-shaped hole or to equilibrium shaped hillock formation [22][23][24] depending on the competing relaxation mechanism.…”
Section: Introductionmentioning
confidence: 99%
“…Diusion of ad-atoms into GBs can lead to formation of compressive stress during deposition of metal lms, 12,15 while in turn stress may drive out-diusion via GBs 12 or cause GB migration. 13,16,17 In contrast to pure metal lms, in compound semiconductor lms, stress may form due to compositiondependent lattice parameters. In the case of Cupoor CIGSe, the lattice expands with increasing Cu concentration.…”
mentioning
confidence: 99%
“…Reduction of grain boundary (GB) energies or defect densities were proposed as possible driving forces for grain growth; 79 however, no attention has so far been paid to the potential role of stress energy for the microstructural changes. In other thin lm materials evolution of intrinsic stress and their interplay with grain growth has been studied intensely both experimentally 1214 and theoretically, 15,16 due to its importance for the mechanical stability of thin lms. Diusion of ad-atoms into GBs can lead to formation of compressive stress during deposition of metal lms, 12,15 while in turn stress may drive out-diusion via GBs 12 or cause GB migration.…”
mentioning
confidence: 99%
“…The formation of large facetted crystals during grain growth and dewetting of thin films during hydrogenation of Mg also suggests the importance of stress-induced coarsening to thin-film stability in the presence of a phase change. 106 Research on modeling and measuring stress generation and relaxation in thin films by competing processes during thin-film formation, 115 thermal cycling, 116 applied stresses, 107,117 or isothermal stress generation processes, such as intermetallic formation during room-temperature annealing of Sn films on Cu, [118][119][120][121] is revealing the role of microstructural heterogeneity and crystalline anisotropy on the response of different thin films to stress. Further progress will require a more detailed understanding of how grain boundaries and interfaces migrate and respond to applied stresses, the mechanisms and conditions for coupling stress and grain boundary motion, and the ability of grain boundaries and surfaces to act as vacancy sources and sinks for diffusional creep.…”
Section: Functionality and Control Of Materials Far From Equilibriummentioning
confidence: 99%