Abstract:The concept of atomically controlled processing for group IV semiconductors is shown based on atomic-order surface reaction control in Si-based CVD epitaxial growth. Si or Si1-xGex epitaxial growth on N, P or C atomic layer formed on Si(100) or Si1-xGex (100) surface, is achieved at temperatures below 500 oC. In the Si0.5Ge0.5 epitaxial layer, a N doping dose of 6x1014 cm-2 is confined within an about 1.5 nm thick region and the confined N atoms in Si1-xGex preferentially form Si-N bonds. In Si cap layer growt… Show more
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