2022
DOI: 10.1016/j.ceramint.2022.02.259
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Atomic simulation of textured silicon carbide surface ultra-precision polishing

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Cited by 31 publications
(9 citation statements)
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“…The normal force is always greater than the tangential force; these findings are consistent with previous studies. 3,34 However, regardless of whether the coating thickness is 1.5 nm or 1 nm, the cutting force of Cu coating is always lower than that of other metal coatings when the coating thickness is the same. The tangential force of the uncoated model is about 800 nN greater than that of the 1.5 nm Cu coating and 450 nN greater than that of the 1 nm Cu coating.…”
Section: Resultsmentioning
confidence: 99%
See 1 more Smart Citation
“…The normal force is always greater than the tangential force; these findings are consistent with previous studies. 3,34 However, regardless of whether the coating thickness is 1.5 nm or 1 nm, the cutting force of Cu coating is always lower than that of other metal coatings when the coating thickness is the same. The tangential force of the uncoated model is about 800 nN greater than that of the 1.5 nm Cu coating and 450 nN greater than that of the 1 nm Cu coating.…”
Section: Resultsmentioning
confidence: 99%
“…32 Therefore, the y direction of the model is set as a periodic boundary to reduce the size effect. As it is previously reported, 33,34 the outermost layer of the workpiece is set as a fixed layer to prevent the workpiece from moving. The thermostatic layer is used to dissipate excess heat, while the atoms in Newton's layer and coating follow Newton's second law.…”
Section: Model Establishmentmentioning
confidence: 99%
“…To simulate the roughness of materials surface, we set texture with different directions on the copper film to investigate the effect of texture direction on the scraping process of nickelcopper bilayer film [17,19,[33][34][35]. Due to the crystal anisotropy, the performance of nickel atoms that arrange along different crystallographic orientation vary at nano scale.…”
Section: Effects Of Texture Direction and Crystallographic Orientationmentioning
confidence: 99%
“…Consequently, the processing quality and precision of copper cannot be guaranteed, and this can adversely affect the dimensional accuracy and mechanical properties of copper devices, especially impacting their service life. 12–14 Therefore, to minimize the impact of processing damage on material properties and service life, it is essential to study the formation and evolution of damage during high-precision processing.…”
Section: Introductionmentioning
confidence: 99%