2024
DOI: 10.1039/d3nr06169h
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Atomic-scale stress modulation of nanolaminate for micro-LED encapsulation

Di Wen,
Jiacheng Hu,
Ruige Yuan
et al.

Abstract: Micro/Nano-LEDs for AR and VR applications face the challenge that the edge effect in Micro-LEDs become significant as size of devices shrinks. This issue can be effectively addressed through thin...

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Cited by 2 publications
(5 citation statements)
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References 37 publications
(43 reference statements)
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“…Achieving high Γ is crucial because when Γ is small or G ss exceeds Γ, the film may fracture or crack. Wen et al developed ALD and PEALD binary systems at the same process temperature with precise thickness ratio modulation at atomic scale, achieving σ r of nanolaminates to zero and effectively reducing G ss [49]. The same process temperature generates lower interfacial stress, and the chemical bonding at the interface, demonstrates high Γ, ensuring a clear and compact interface in the TEM image.…”
Section: Bendable Multilayer Structuresmentioning
confidence: 99%
See 3 more Smart Citations
“…Achieving high Γ is crucial because when Γ is small or G ss exceeds Γ, the film may fracture or crack. Wen et al developed ALD and PEALD binary systems at the same process temperature with precise thickness ratio modulation at atomic scale, achieving σ r of nanolaminates to zero and effectively reducing G ss [49]. The same process temperature generates lower interfacial stress, and the chemical bonding at the interface, demonstrates high Γ, ensuring a clear and compact interface in the TEM image.…”
Section: Bendable Multilayer Structuresmentioning
confidence: 99%
“…These structures primarily employ three strategies: inorganic laminates, organic buffer layers, and top modification layers, to achieve bendability while preserving high barrier properties. Inorganic laminates, employing materials such as Al 2 O 3 , TiO 2 , SiO 2 , ZrO 2 , SnO 2 , and SiN x [49,56,[64][65][66][67][68][69][70], exhibit high barrier properties with WVTR lower than 10 −5 g m −2 d −1 . Unlike simple multilayer stacks, inorganic laminates achieve higher flexibility through stress modulation [49,66].…”
Section: Bendable Multilayer Structuresmentioning
confidence: 99%
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“…Among various luminescent materials, perovskites with ABY 3 structure (A = monovalent cations, B = divalent metal, and Y = Cl, Br, I) have been studied for optical detection, light-emitting diodes, and flexible display, due to their near-unity photoluminescence quantum yield (PLQY), adjustable emission wavelength and facile synthesis. In the field of anticounterfeiting, perovskite NCs with different components and structures have been utilized as anticounterfeiting films and printing inks. For example, Gao et al integrated the traditional SrAl 2 O 4 :Eu 2+ phosphors and the thermoplastic material TPU to acquire stretchable, flexible, and transparent anticounterfeiting films .…”
Section: Introductionmentioning
confidence: 99%