2021
DOI: 10.1016/j.apsusc.2020.148129
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Atomic-scale silicidation of low resistivity Ni-Si system through in-situ TEM investigation

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Cited by 13 publications
(6 citation statements)
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“…The growth of thin films with only the NiSi phase is very important becaus the mixed film of NiSi and high resistivity the Ni2Si phase may lead to higher resistance induced loss of the cells. After annealing at different temperatures, Ni and Si form different phases, such as Ni 2 Si, NiSi, and NiSi 2 [30,31]. Among the different nickel silicide phases formed by the seed layer, the NiSi phase is the lowest resistivity phase in the silicide phase.…”
Section: Resultsmentioning
confidence: 99%
“…The growth of thin films with only the NiSi phase is very important becaus the mixed film of NiSi and high resistivity the Ni2Si phase may lead to higher resistance induced loss of the cells. After annealing at different temperatures, Ni and Si form different phases, such as Ni 2 Si, NiSi, and NiSi 2 [30,31]. Among the different nickel silicide phases formed by the seed layer, the NiSi phase is the lowest resistivity phase in the silicide phase.…”
Section: Resultsmentioning
confidence: 99%
“…A number of works about self-assembled epitaxial Ni silicide have been published [ 41 46 ], and some works pointed out that the Ni 2 Si phase formed first, followed by NiSi and NiSi 2 after annealing [ 47 49 ]. Generally, NiSi 2 forms above 600 °C [ 42 45 48 ]. Therefore, the self-assembled epitaxial line structures in this work are supposed to be NiSi 2 .…”
Section: Resultsmentioning
confidence: 99%
“…Au/Si phase separation occurs during cooling [ 3 , 55 ], and Ni silicide may remain stable down to room temperature [ 41 46 ], finally forming particles with two contrasts. Besides, Ni may also diffuse into the Si substrate, leading to the formation of the Ni silicide, and a cross-sectional view of Ni silicide is given in Figure 4c based on reported works [ 44 , 48 , 56 ]. The elongation process of the symmetric NiSi 2 clusters is mainly governed by the growth kinetics [ 44 , 57 58 ].…”
Section: Resultsmentioning
confidence: 99%
“…The total oil resources in the basin are about 8.6 billion tons, ranking fourth in the China . After years of exploration and research, it has been found that the Triassic Yanchang Formation reservoirs in Dingbian, Jiyuan, Huanxian, Ansai, and other areas in the basin contain abundant low-resistivity oil and gas resources. , The Yanchang Formation reservoir has complex pore structure, low permeability, and the growth of low-resistivity oil pays, which has brought great obstacles to exploration and development . In 2019, Zhidan Oil Production plant found Chang 6 1 low-resistivity oil pay with a resistivity of 6–12 Ω·m in some wells such as Well F854 in Zhidan District, while the resistivity of other pays was mostly 25–30 Ω·m, which failed to produce oil in the test or failed to meet the industrial oil flow standard.…”
Section: Introductionmentioning
confidence: 99%