2009
DOI: 10.1103/physrevb.80.125211
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Atomic scale high-angle annular dark field STEM analysis of the N configuration in dilute nitrides of GaAs

Abstract: While high-angle annular dark field scanning transmission electron microscopy ͑HAADF-STEM͒ has been successfully used for the analysis of heavy atoms in a lighter matrix, the detection of light atoms in a heavy matrix remains challenging. In this paper, we show that the combination of first-principles total-energy calculations with aberration-corrected HAADF-STEM experimental and simulated images can be used to overcome this problem. The application of this methodology to the analysis of dilute nitrides of GaA… Show more

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Cited by 24 publications
(17 citation statements)
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“…However, the existence of strain in the films and relaxation of strain at the surfaces of the TEM specimen make interpretation of the measured intensity profile less straightforward. For example, atomic size mismatch strain induced reversed ADF-STEM image contrast between dilute semiconductor heteroepitaxial strained layers and substrates has been reported in GaNAs/GaAs [8,11,12] and SiC/Si systems [9]. In addition, a reduction in the ADF image intensity of InGaAs layers at both interfaces with adjacent GaAs layers due to strain relaxation has also been observed [10].…”
Section: Introductionmentioning
confidence: 92%
“…However, the existence of strain in the films and relaxation of strain at the surfaces of the TEM specimen make interpretation of the measured intensity profile less straightforward. For example, atomic size mismatch strain induced reversed ADF-STEM image contrast between dilute semiconductor heteroepitaxial strained layers and substrates has been reported in GaNAs/GaAs [8,11,12] and SiC/Si systems [9]. In addition, a reduction in the ADF image intensity of InGaAs layers at both interfaces with adjacent GaAs layers due to strain relaxation has also been observed [10].…”
Section: Introductionmentioning
confidence: 92%
“…Experimental intensity ratio or contrast is then compared with a simulated ratio instead of direct intensity comparison. The ratio has a low dependency on for instance thickness, which is otherwise a critical parameter in quantitative HAADF-STEM work (Grillo et al, 2008;Herrera et al, 2009;Rosenauer et al, 2009). The method has been successfully applied to composition analysis of various structures, quantum wells being the most typical object (Grillo et al, 2008;Herrera et al, 2009;Grillo, 2009;Rosenauer et al, 2011).…”
Section: Introductionmentioning
confidence: 94%
“…In ADF images, the GaAsSbN layers appear brighter than the GaAs, mainly due to the N presence [37]. No clear contrasts due to, for example, composition modulation or vertical segregation phenomena were exhibited in samples along the growth direction as we can see in Fig.…”
Section: Resultsmentioning
confidence: 99%