2014
DOI: 10.1016/j.apsusc.2013.12.129
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Atomic scale calculations of tungsten surface binding energy and beryllium-induced tungsten sputtering

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Cited by 37 publications
(25 citation statements)
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“…The maximum energy transfer ratio of atoms of interest and maximum transferring energy from incident particle with an energy of 75 eV are summarized in Table 1. Since the surface binding energy of tungsten is 8.8 − 11.75 eV [20,21], the maximum transferring energy of 75 eV helium to tungsten (6.3 eV) is insufficient for yielding sputtering, while the maximum transferring energy to iron (18.7 eV) is sufficient for yielding sputtering. Furthermore, a part of molybdenum mask plate is also exposed to plasma, and the maximum transferring energy of 75 eV helium to molybdenum (11.5 eV) is marginal for yielding sputtering.…”
Section: Discussionmentioning
confidence: 99%
“…The maximum energy transfer ratio of atoms of interest and maximum transferring energy from incident particle with an energy of 75 eV are summarized in Table 1. Since the surface binding energy of tungsten is 8.8 − 11.75 eV [20,21], the maximum transferring energy of 75 eV helium to tungsten (6.3 eV) is insufficient for yielding sputtering, while the maximum transferring energy to iron (18.7 eV) is sufficient for yielding sputtering. Furthermore, a part of molybdenum mask plate is also exposed to plasma, and the maximum transferring energy of 75 eV helium to molybdenum (11.5 eV) is marginal for yielding sputtering.…”
Section: Discussionmentioning
confidence: 99%
“…The mass of atoms detached, in the same period of time, for each material is dependent on how strongly they are attached to the other atoms, meaning how large their surface binding energy is. The surface binding energy of W and Au is E bindingW =11.75 eV and E bindingAu =4.13 eV, respectively [37,38]. As we would like to compare in a dimensionless way, the behavior of the physical quantities involved in our system, we notice that the ratio of these two energies ( ).…”
Section: Characterization Of the Desorption Mechanismmentioning
confidence: 99%
“…Commonly likened to the sublimation energy [44,45], it is possible to determine this quantity from atomistic simulations [45]. The SBE for the SW m potential used in our work is computed in a scheme similar to the one of Yang et al [46]. Considering the free surface of a perfect crystal at 0 K, a velocity parallel to the outward-pointing normal of this surface is prescribed to an atom, and a MD simulation is performed in the NVE ensemble for 2 ps.…”
Section: Calculation Of Threshold Displacement Energy and Surface Binmentioning
confidence: 99%