Contrary to the well established vapor-liquid-solid (VLS) mechanism widely used for the metal-catalyzed bottom-up synthesis of nanowires, the reversed solid-liquid-vapor (SLV) mechanism is rarely studied. Solid-liquid-vapor etching allows in principle to create nanowire-shaped holes, which would significantly expand the toolbox of bottom-up synthesis methods towards complex nanostructure assembly. Here, we aimed to realize SLV etching of single-crystalline silicon using a hydrogen plasma for etching instead of corrosive gases. We were able to demonstrate that the etching of holes using reactive hydrogen species is in principle feasible but requires deliberate adjustment of the process parameters. Furthermore, we investigated the effect of catalyst size, etching time and hydrogen flow rate on the process and discuss the theoretical background of the SLV mechanism.