Atomic Precision Processing of Two-Dimensional Materials for Next-Generation Microelectronics
Jinkyoung Yoo,
Chang-Yong Nam,
Ezra Bussmann
Abstract:The growth of the information era economy is driving the pursuit of advanced materials for microelectronics, spurred by exploration into "Beyond CMOS" and "More than Moore" paradigms. Atomically thin 2D materials, such as transition metal dichalcogenides (TMDCs), show great potential for next-generation microelectronics due to their properties and defect engineering capabilities. This perspective delves into atomic precision processing (APP) techniques like atomic layer deposition (ALD), epitaxy, atomic layer … Show more
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