“…Layer structure, thickness, total roughness ͑chemical+ topological͒, and chemical roughness of individual layers determined by fitting RBS and XRR spectra for ͑a͒ Fe/ Al/ SiO 2 on Si and ͑b͒ Al/ Fe/ SiO 2 on Si. 11,[24][25][26][27] Ab initio pseudopotential calculations on the atomistic behavior of TM/Al͑001͒ and Al/TM͑001͒ surfaces explain this asymmetric behavior as due to the difference in energy barriers for the incorporation of the respective adatom into the substrate, with TM adatoms on the Al͑001͒ surface having relatively smaller incorporation barriers, leading to more intermixing for TM/ Al͑001͒ than for the Al/TM͑001͒ system. 27 In previous work we described an approach to stabilize the Fe-Al interface using a thin Ti͑ϳ15 Å͒ layer to reduce intermixing between Fe-Al at the interface.…”