2023 IEEE International Interconnect Technology Conference (IITC) and IEEE Materials for Advanced Metallization Conference (MAM 2023
DOI: 10.1109/iitc/mam57687.2023.10154833
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Atomic layer etching of molybdenum with fluorination and ion bombardment

Yong-Jae Kim
1
,
Hyo Kang
2
,
Heeju Ha
3
et al.
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