2023
DOI: 10.1088/2631-7990/acc76d
|View full text |Cite
|
Sign up to set email alerts
|

Atomic layer deposition to heterostructures for application in gas sensors

Abstract: Atomic layer deposition (ALD) is a versatile technique to deposit metal oxide sensing materials at the atomic scale to achieve improved sensor functions. This article reviews metal oxide semiconductor (MOS) heterostructures for gas sensing applications. In particular, three types of MOS-based heterostructures synthesized by ALD are discussed, including ALD metal catalysts on MOS, ALD MO on MOS and MOS core-shell heterostructure, and their sensing mechanisms are carefully analyzed. Finally, the further developm… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
1
1
1

Citation Types

0
9
0

Year Published

2023
2023
2024
2024

Publication Types

Select...
9
1

Relationship

1
9

Authors

Journals

citations
Cited by 17 publications
(9 citation statements)
references
References 101 publications
(128 reference statements)
0
9
0
Order By: Relevance
“…Then, Fe 2 O 3 was etched by Ar plasma treatment for a certain time to form Fe 2 O 3 –V o rich in oxygen vacancies. Further, five cycles of metal Pt were deposited on the surface of Fe 2 O 3 nanosheets by atomic layer deposition (ALD). , Finally, Pt–Fe 2 O 3 –V o samples were obtained by hydrogenation of oxidized Pt in an Ar/H 2 atmosphere.…”
Section: Resultsmentioning
confidence: 99%
“…Then, Fe 2 O 3 was etched by Ar plasma treatment for a certain time to form Fe 2 O 3 –V o rich in oxygen vacancies. Further, five cycles of metal Pt were deposited on the surface of Fe 2 O 3 nanosheets by atomic layer deposition (ALD). , Finally, Pt–Fe 2 O 3 –V o samples were obtained by hydrogenation of oxidized Pt in an Ar/H 2 atmosphere.…”
Section: Resultsmentioning
confidence: 99%
“…This technique offers the capability to uniformly distribute nanoparticles on suitable supports, ranging in size from nanometers to single atoms [155][156][157][158]. Additionally, ALD exhibits the ability to penetrate high surface area porous supports, making it well-suited for the synthesis of gas sensing materials [159]. Typically, the preparation of SACs via the ALD technique involves four steps (figure 5(a)) [92,[130][131][132].…”
Section: Atomic Layer Depositionmentioning
confidence: 99%
“…Gas sensors are capable of converting the composition and concentration information of the measured gas into electrical signals [65], which can be considered as simulated olfactory perception. Zhou et al propose a piezotronic effect enhanced gas sensor based on ZnO NW, which can be used to detect hydrogen (H 2 ) and nitrogen dioxide (NO 2 ) gases (figure 6(c-i)) [63].…”
Section: Piezotronic Devices For Sensing Functionsmentioning
confidence: 99%