Atomic Layer Deposition on Soft Materials

Parsons, Gregory N.

doi:10.1002/9783527639915.ch12

Cited by 18 publications

(25 citation statements)

References 148 publications

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“…C) TEM image of a cellulose fibril coated by the atomic layer deposition with alumina and D) SEM image of sol–gel silica coating cellulose fiber. C) Adapted with permission . Copyright 2012, Wiley‐VCH.…”

Section: Coatingmentioning

confidence: 99%

Cellulose Mineralization as a Route for Novel Functional Materials

Shchipunov

Postnova

2018

Adv Funct Materials

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Cellulose possesses excellent properties, but its performance characteristics do not satisfy human requirements completely, which has soured a constant effort to improve its features. Currently, cellulose is combined with inorganics in a process called mineralization that results in a novel type of materials referred to as bio-nanocomposites. There are many examples of mineralized tissues with superior properties in living nature. This circumstance gives us a reason to biomimic them by compounding biopolymers with inorganics. Here, the main mineralization techniques, properties, structure, functionality, and application of mineralized cellulose are the focus. Cellulose can be combined with inorganics through the vapor phase or by the methods of wet chemistry. Much attention has been paid to sol-gel chemistry, which is of first importance in cellulose mineralization. Inorganics can protect polysaccharides, regulate hydrophilicity-hydrophobicity, and impart self-cleaning, antimicrobial and conducting properties, which not only improves them but results in bio-nanocomposites with novel functionalities and performance, not known before for cellulosic materials. Further calcination and carbonization of mineralized cellulose under mild conditions give nanosized metals, metal oxides, and their nanocomposites with carbon, which are often unavailable by conventional methods. Therefore, mineralization is used to develop innovative textiles, oil absorbent and oil/water separating membranes, catalysts and photocatalysts, solar cells, conductors, supercapacitors, transistors and batteries for flexible electronics, and energy storage devices. These nontraditional and highly promising areas for applications have caused an intense interest in cellulose that resembles its rediscovery.

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Section: Coatingmentioning

confidence: 99%

Cellulose Mineralization as a Route for Novel Functional Materials

Shchipunov

Postnova

2018

Adv Funct Materials

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“…Unlike electrodeposition, 8,9 successive ionic layer adsorption and reaction, 10,11 and chemical bath deposition, 12,13 ALD is a gas phase process and so does not require a solvent, which can lead to swelling and/or degradation of the organic film. 14 ALD can also proceed at low temperatures ( 50 C) unlike other gas phase deposition methods, e.g., chemical vapor deposition (CVD), 15 and so is compatible with organic thin films. Finally, the thickness of the film can be precisely controlled, which is difficult in CVD and physical deposition processes.…”

Section: Introductionmentioning

confidence: 99%

Room temperature atomic layerlike deposition of ZnS on organic thin films: Role of substrate functional groups and precursors

Shi

Walker

2015

Journal of Vacuum Science &Amp; Technology A: Vacuum, Surfaces, and Films

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Impact of surface morphology of Si substrate on performance of Si/ZnO heterojunction devices grown by atomic layer deposition technique J. Vac. Sci. Technol. A 33, 01A114 (2015); 10.1116/1.4900719 Atomic layer deposition of ZnO on Cu-nanoclusters for methanol synthesis J. Vac. Sci. Technol. A 31, 01A144 (2013); 10.1116/1.4772460Influence of organozinc ligand design on growth and material properties of ZnS and ZnO deposited by atomic layer depositionThe room temperature atomic layerlike deposition (ALLD) of ZnS on functionalized self-assembled monolayers (SAMs) was investigated, using diethyl zinc (DEZ) and in situ generated H 2 S as reactants. Depositions on SAMs with three different terminal groups, -CH 3, -OH, and -COOH, were studied. It was found that the reaction of DEZ with the SAM terminal group is critical in determining the film growth rate. Little or no deposition is observed on -CH 3 terminated SAMs because DEZ does not react with the methyl terminal group. ZnS does deposit on both -OH and -COOH terminated SAMs, but the grow rate on -COOH terminated SAMs is $10% lower per cycle than on -OH terminated SAMs. DEZ reacts with the hydroxyl group on -OH terminated SAMs, while on -COOH terminated SAMs it reacts with both the hydroxyl and carbonyl bonds of the terminal groups. The carbonyl reaction is found to lead to the formation of ketones rather than deposition of ZnS, lowering the growth rate on -COOH terminated SAMs. SIMS spectra show that both -OH and -COOH terminated SAMs are covered by the deposited ZnS layer after five ALLD cycles. In contrast to ZnO ALLD where the composition of the film differs for the first few layers on -COOH and -OH terminated SAMs, the deposited film composition is the same for both -COOH and -OH terminated SAMs. The deposited film is found to be Zn-rich, suggesting that the reaction of H 2 S with the Zn-surface adduct may be incomplete.

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“…17 Further, there is no requirement for a solvent which can cause swelling and/or degradation of the organic film. 15 Other advantages of ALD include large area uniformity, precise control of the deposited film thickness, and conformal deposition on 3D structures. 15,17,18 Atomic layer deposition processes have been employed on polymer surfaces to improve the mechanical stability of films, 19,20 to alter optical properties, 19 and to produce porous materials, membranes, nanotubes, and other structures.…”

Section: Introductionmentioning

confidence: 99%

“…15 Other advantages of ALD include large area uniformity, precise control of the deposited film thickness, and conformal deposition on 3D structures. 15,17,18 Atomic layer deposition processes have been employed on polymer surfaces to improve the mechanical stability of films, 19,20 to alter optical properties, 19 and to produce porous materials, membranes, nanotubes, and other structures. 21 In addition, the interaction of metal-containing ALD precursors with organic thin films, including polymers and SAMs, is of interest for lithography applications.…”

Section: Introductionmentioning

confidence: 99%

Room Temperature Atomic Layer-like Deposition of ZnO on Functionalized Self-Assembled Monolayers

Shi

Walker

2014

J. Phys. Chem. C

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The room temperature atomic layer-like deposition (ALLD) of ZnO using diethylzinc (DEZ) and water precursors has been investigated on −COOH, −OH, and −CH 3 terminated self-assembled monolayers. The detailed reaction pathways of ZnO ALLD on −COOH and −OH terminated SAMs are different. As expected on −OH terminated SAMs, the DEZ reacts with the hydroxyl group. However, on −COOH terminated SAMs DEZ reacts with both the carbonyl and hydroxyl bonds present and can lead to the formation of a ketone rather than ZnO deposition. The growth rates on these SAMs are different; after the first ALLD cycle the measured growth rates are 3.0 ± 0.1 and 3.4 ± 0.2 Å/cycle on −COOH and −OH terminated SAMs, respectively. XPS analyses show that the initial composition of the deposited layer on −COOH terminated SAMs is similar to Zn(OH) 2 . After five ALLD cycles the −COOH terminated SAM is completely covered, and XPS analyses indicate that the deposited film is composed of ZnO. In contrast on −OH terminated SAMs, the deposited film is ZnO for all ALLD cycles studied. Eight ALLD cycles are required to cover −OH terminated SAMs, suggesting that ZnO first forms islands on the surface. Little or no deposition is observed on −CH 3 terminated SAMs because the methyl group does not react with DEZ. These data indicate that surface functional groups can be employed to control the properties of ZnO films grown by ALD.

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Atomic Layer Deposition on Soft Materials

Cited by 18 publications

References 148 publications

Cellulose Mineralization as a Route for Novel Functional Materials

Cellulose Mineralization as a Route for Novel Functional Materials

Room temperature atomic layerlike deposition of ZnS on organic thin films: Role of substrate functional groups and precursors

Room Temperature Atomic Layer-like Deposition of ZnO on Functionalized Self-Assembled Monolayers

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