Atomic Layer Deposition of W:Al<sub>2</sub>O<sub>3</sub> Nanocomposite Films with Tunable Resistivity

Mane, Anil U.; Elam, Jeffrey W.

doi:10.1002/cvde.201307054

Cited by 37 publications

(41 citation statements)

References 46 publications

(55 reference statements)

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“…The anode readout strips extend through the side wall from vacuum to air. As the key element, the MCPs are made of microchannel glass substrates [15] [27] coated by ALD [16][17] [18] , featuring 20 m pores and a length-to-diameter (L/D) ratio of 60. The open area ratio is about 60%.…”

Section: Stack Componentsmentioning

confidence: 99%

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Wang

Byrum

Demarteau

et al. 2015

Nuclear Instruments and Methods in Physics Research Section A:

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Micro-channel plate (MCP)-based photodetectors are capable of picosecond level time resolution and sub-mm level position resolution, which makes them a perfect candidate for the next generation large area photodetectors. The large-area picosecond photodetector (LAPPD) collaboration is developing new techniques for making large-area photodetectors based on new MCP fabrication and functionalization methods. A small single tube processing system (SmSTPS) was constructed at Argonne National Laboratory (ANL) for developing scalable, cost-effective, glass-body, 6 cm × 6 cm, picosecond photodetectors based on MCPs functionalized by Atomic Layer Deposition (ALD). Recently, a number of fully processed and hermitically sealed prototypes made of MCPs with 20 m pores have been fabricated. This is a significant milestone for the LAPPD project. These prototypes were characterized with a pulsed laser test facility. Without optimization, the prototypes have shown excellent results: The time resolution is ~57 ps for single photoelectron mode and ~15 ps for multi-photoelectron mode; the best position resolution is ≤ 0.8 mm for large pulses. In this paper, the tube processing system, the detector assembly, experimental setup, data analysis and the key performance will be presented.

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Section: Stack Componentsmentioning

confidence: 99%

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Wang

Byrum

Demarteau

et al. 2015

Nuclear Instruments and Methods in Physics Research Section A:

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“…A key advantage of ALD is its ability to coat small pores with high L/d ratios. Nanocomposite ALD resistive coatings have been developed that meet all of the requirements for large area MCPs [5,6].…”

Section: Ald Coated Mcpsmentioning

confidence: 99%

Pilot production & commercialization of LAPPD™

Minot

Bennis

Bond

et al. 2015

Nuclear Instruments and Methods in Physics Research Section A:

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Keywords:Large-area picosecond photodetectors (LAPPD) Time of flight detector Glass capillary array (GCA) Microchannel plate (MCP) Atomic layer deposition (ALD) a b s t r a c tWe present a progress update on plans to establish pilot production and commercialization of Large Area (400 cm 2 ) Picosecond Photodetector (LAPPD ™ ). Steps being taken to commercialize this MCP and LAPPD ™ technology and begin tile pilot production are presented including (1) the manufacture of 203 mm Â 203 mm borosilicate glass capillary arrays (GCAs), (2) optimization of MCP performance and creation of an ALD coating facility to manufacture MCPs and (3) design, construction and commissioning of UHV tile integration and sealing facility to produce LAPPDs. Taken together these plans provide a "pathway toward commercialization".& 2014 Elsevier B.V. All rights reserved. LAPPDThe Large Area Picosecond Photodetector (LAPPD ™ ) is a microchannel plate (MCP) based photodetector, capable of imaging, and having both high spatial and temporal resolution in a vacuum package with an active area of 400 cm 2 . LAPPD ™ are characterized by a uniquely simple design based upon an all-glass vacuum package comprised of top and bottom plates and square sidewall, each made of borosilicate float glass, depicted in Fig. 1.Key design features of the LAPPD include: (a) an internal chevron pair stack of "next generation" MCPs produced by applying resistive and emissive coatings to borosilicate glass capillary array (GCA) substrates; (b) a modular all-glass detector package with conductive RF microstrips passing through a glass frit seal that hermetically bonds the side walls to the bottom anode plate while allowing electrical contact to the interior of the device; eliminating the need for metal electrical pins penetrating the evacuated detector package; (c) resistively coated spacers that function as high voltage (HV) dividers to distribute voltage across the MCP chevron stack, eliminating the need for separate electrical leads contacting the tops and bottoms of both MCPs; and (d) RF stripline anodes applied to the bottom plate with an analog bandwidth above 1.5 GHz for good spatial and temporal resolution [1]. MCP based photodetectorsMCP's consists of millions of conductive glass capillaries (4-25 mm in diameter) fused together and sliced into a thin plate [2]. Each capillary or channel works as an independent secondary-electron multiplier. Single electrons that hit a pore on one side of the plate convert into large bunches of electrons that cascade from the other side [3], with typical amplification from a pair of plates of 10 7 . Fig. 2 (left) shows a large area glass capillary array (GCA) consisting of millions of 20 mm diameter pores with an overall size of 203 mm Â 203 mm Â 1.2 mm with an aspect ratio¼60:1, bias angle of 81, and open area ratio of 60%. Atomic Layer Deposition (ALD) techniques are used to apply resistive and emissive coatings, converting the GCA into a high performance MCP. A high voltage is applied across the top and bottom surfaces of the...

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“…Instead of H-firing to achieve the functional MCP coating, the capillary array plates are functionalized by applying resistive and emissive coatings via an atomic layer deposition (ALD) process [2]. ALD is a thin film coating method that utilizes alternating exposures of gaseous chemical precursors and a solid surface to deposit materials in an atomic layer-by-layer fashion.…”

Section: Atomic Layer Deposition Coatingmentioning

confidence: 99%

Large Area Microchannel Plates for LAPPD™

Craven¹,

Bennis²,

Bond³

et al. 2015

Proceedings of Technology and Instrumentation in Particle Physics 2014 — PoS(TIPP2014)

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Manufacturing plans for "next generation" microchannel plates (MCPs) and the technical advantages enabled by this evolving technology are presented. The Large Area Picosecond Photodetector (LAPPD) is an MCP based photodetector, capable of imaging, with high spatial and temporal resolution in a hermetic package with an active area of 400 square centimeters. A key component of LAPPD is a chevron pair of large area (20 x 20 cm) MCPs. The manufacture of these large-area high performance MCPs has been enabled by the convergence of two technological breakthroughs. The first is the ability to produce large blocks of hollow, micronsized glass capillary arrays (GCAs) developed by Incom Inc. The Incom process is based on the use of an etchless "hollow-core" approach in the glass drawing process, eliminating the need to remove core material by chemical etching. The arrays are fabricated as large blocks that can be sliced to form large area wafers, without regard to the conventional limits of L/d (capillary length / pore diameter). Moreover, the glass used in these GCAs is physically more robust, does not have a tendency to warp, and has low levels of radioactive isotopes resulting in low dark noise. The second breakthrough is the advent of atomic layer deposition (ALD) coating methods and materials to functionalize GCAs to impart the necessary resistive and secondary emission properties suitable for large area detector applications. Recent results demonstrating the high performance, uniformity, and long term stability of the current MCP product are presented.

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Atomic Layer Deposition of W:Al₂O₃ Nanocomposite Films with Tunable Resistivity

Cited by 37 publications

References 46 publications

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Pilot production & commercialization of LAPPD™

Large Area Microchannel Plates for LAPPD™

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Atomic Layer Deposition of W:Al2O3 Nanocomposite Films with Tunable Resistivity

Cited by 37 publications

References 46 publications

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Development and testing of cost-effective, 6 cm×6 cm MCP-based photodetectors for fast timing applications

Pilot production & commercialization of LAPPD™

Large Area Microchannel Plates for LAPPD™

Contact Info

Product

Resources

About

Atomic Layer Deposition of W:Al₂O₃ Nanocomposite Films with Tunable Resistivity