Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Niskanen, Antti; Varpula, Aapo; Utriainen, Mikko; Natarajan, Gomathi; Cameron, D.C.; Новиков, С. В.; Airaksinen, V.-M.; Sinkkonen, J.; Franssila, Sami

doi:10.1016/j.snb.2010.05.018

Cited by 26 publications

(11 citation statements)

References 17 publications

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“…[1,2] The purpose of these sensors is the detection of gases such as O 3 , NO x , CO, NH 3 , C 2 H 5 OH, ... and the measurement of their concentration in the atmosphere. The sensitive layer of the sensor device consists in n-type semiconductors MOx such as WO 3 , SnO 2 , ZnO, TiO... [3][4][5][6][7][8][9][10][11][12][13][14][15][16][17] or p-type ones such as CuO, Cu 2 O, Cr…”

Section: Introductionmentioning

confidence: 99%

Experimental and ab initio study of the O3 detection at the CuO (111) surface

et al. 2014

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Combining experiments and first-principles calculations, we present in this paper a detailed study of the O 3 detection mechanism on the CuO (111) surface. The exchange-correlation functional is treated within both the LDA and the GGA including the spin polarization. In order to better take into account the on-site electronic interactions between 3d electrons of Cu atoms a Hubbard term U has to be added in all calculations. We show that the O 3 molecule is reduced to a O 2 molecule with an enthalpy of reaction of −1.11 eV (−1.15 eV) within LDA+U (GGA+U). Along the reaction path, the O 3 molecules are first physisorbed with a large adsorption energy of −1.83 eV (−1.03 eV) and a significant charge transfer from the surface to the molecule. The p-doping strengthening is compared to the electrical response of a CuO based sensor under O 3 exposure.

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Section: Introductionmentioning

confidence: 99%

Experimental and ab initio study of the O3 detection at the CuO (111) surface

et al. 2014

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“…10(b). Niskanen et al [143] used ALD to produce gassensitive tin dioxide film in a microhotplate gas sensor. Ethanol, acetone, and acrylonitrile were used as model analytes to investigate the device performance.…”

Section: Applications Of Ald In Other Sensorsmentioning

confidence: 99%

Atomic layer–deposited nanostructures and their applications in energy storage and sensing

et al. 2019

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“…The film displays a higher conductivity due to the high concentration of oxygen vacancies and a higher sensitivity to CO compared to films grown from SnCl 4 . Polycrystalline films of SnO 2 deposited from SnCl 4 and water at 500 °C showed also to be sensitive to volatile organic compounds such as ethanol, acetone and acrylonitrile . A plasma enhanced ALD process was developed starting from dibutyl tin diacetate and oxygen plasma.…”

Section: Thin Films As Gas Sensorsmentioning

confidence: 99%

Atomic Layer Deposition to Materials for Gas Sensing Applications

Marichy

Pinna

2016

Adv Materials Inter

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Atomic layer deposition is a thin film deposition technique based on self‐terminated surface reactions. Contrarily to most of the thin film deposition techniques, it is not a line of sight deposition technique due to the sequential introduction of the gaseous precursors and because the reactants can only react with surface species. The precursors can thus diffuse into porous structures and the conformal coating of high aspect ratio structures can be achieved. Because of these peculiarities, atomic layer deposition is an attractive technique for fabricating materials to be applied in resistive gas sensors. This article focuses on materials for resistive gas sensor devices in which the sensing material is elaborated using atomic layer deposition, in at least one step of the fabrication. It will be shown that atomic layer deposition has proven to be well‐suited for the elaboration of compact thin films, nanostructures, and heterostructures to be applied for the detection of a variety of analytes such as toxic compounds, pollutants, explosives, etc. The chemical and physical properties of the sensing layers will be discussed in parallel to the gas sensing mechanisms in an attempt to develop clear structure–property correlations

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Atomic layer deposition of tin dioxide sensing film in microhotplate gas sensors

Cited by 26 publications

References 17 publications

Experimental and ab initio study of the O3 detection at the CuO (111) surface

Experimental and ab initio study of the O3 detection at the CuO (111) surface

Atomic layer–deposited nanostructures and their applications in energy storage and sensing

Atomic Layer Deposition to Materials for Gas Sensing Applications

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