Atomic layer deposition of SnO2 thin films using tetraethyltin and H2O2

Impact of air exposure on growth rate and electrical properties of SnO2 thin films by atmospheric pressure spatial atomic layer deposition

“…In the mentioned applications, conductive SnO 2 thin films of high uniformity and conformality are preferentially deposited at low temperatures (<300 • C). SnO 2 thin films can be deposited using physical routes, such as thermal evaporation or sputtering, or chemical approaches, such as sol-gel, chemical bath deposition, chemical vapor deposition (CVD) or atomic layer deposition (ALD) [1,6,8,9]. Compared to other chemical deposition techniques, ALD has several advantages including low-temperature deposition, low damage to the underneath layers, excellent control of the deposited thickness, and particularly high conformality of coating over a high-aspect ratio surface [10].…”

CuCoO2 Parçacıkları ile Yeni Metal Oksit Kompozitlerin Üretimi ve Kirleticilerin Uzaklaştırılmasında Kullanılması

“…Özellikle TiO2, son zamanlarda fotokataliz uygulamalarında hem araştırma hem de endüstriyel açıdan oldukça ilgi çekmektedir [12,13]. SnO2'de, TiO2'ye benzer fiziksel, kimyasal ve elektriksel özellikler sergilemesiyle, fotokatalizör olarak kullanılmaya elverişli bir yarı iletkendir [14][15][16][17][18]. SnO2 yüksek kimyasal ve termal kararlılığı sahiptir [19].…”

An efficient low-temperature triethylamine gas sensor based on 2D ultrathin SnO2 nanofilms

“…In view of these observations, in this work, we were motivated to employ a facile low-cost tunable, and environmentally friendly hydrothermal method combined with controlling the calcination temperature of the precursor to fabricate crystalline sub-5 nm 2D SnO 2 nanofilms, which are comparable to the atomic deposition method [12]. The proposed hydrothermal synthesis method, which is easy to equip and can be scaled up in large quantities, offers the capability of industrialscale mass production of ultra-thin 2D SnO 2 nanofilms.…”