2007
DOI: 10.1016/j.apsusc.2006.09.010
|View full text |Cite
|
Sign up to set email alerts
|

Atomic layer deposition of iridium(III) acetylacetonate on alumina, silica–alumina, and silica supports

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
4
1

Citation Types

1
65
1

Year Published

2007
2007
2020
2020

Publication Types

Select...
3
2

Relationship

1
4

Authors

Journals

citations
Cited by 39 publications
(67 citation statements)
references
References 34 publications
1
65
1
Order By: Relevance
“…Until now, TPD or TG analyses have not been reported for supported Ir(acac) 3 . The following results have been obtained for chromium(III) acetylacetonate, Cr(acac) 3 , a compound proposed to behave similarly to Ir(acac) 3 in ALD reactions [3], and for acetylacetonate (2,4-pentanedione), H-acac. The main thermal desorption products for silica-supported Cr(acac) 3 and alumina-supported H-acac were acetone (at 250-400°C) and CO 2 (at 300-450°C) [7,8].…”
Section: Introductionmentioning
confidence: 91%
See 3 more Smart Citations
“…Until now, TPD or TG analyses have not been reported for supported Ir(acac) 3 . The following results have been obtained for chromium(III) acetylacetonate, Cr(acac) 3 , a compound proposed to behave similarly to Ir(acac) 3 in ALD reactions [3], and for acetylacetonate (2,4-pentanedione), H-acac. The main thermal desorption products for silica-supported Cr(acac) 3 and alumina-supported H-acac were acetone (at 250-400°C) and CO 2 (at 300-450°C) [7,8].…”
Section: Introductionmentioning
confidence: 91%
“…M(acac) 3 ). Until now, TPD or TG analyses have not been reported for supported Ir(acac) 3 . The following results have been obtained for chromium(III) acetylacetonate, Cr(acac) 3 , a compound proposed to behave similarly to Ir(acac) 3 in ALD reactions [3], and for acetylacetonate (2,4-pentanedione), H-acac.…”
Section: Introductionmentioning
confidence: 98%
See 2 more Smart Citations
“…[11,15,17,22,24,25] We have not succeeded in IR identification of H-bonding of Cr(acac) 3 with hydroxyl groups of silica and alumina because of the possible presence of water adsorbed from the atmosphere. Furthermore, the role of surface hydroxyls of alumina in the reaction mechanism is always difficult to assess due to the heterogeneity of its surface and the complexity of the hydroxyl-stretching region in the IR spectrum of alumina.…”
Section: Resultsmentioning
confidence: 94%