Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review

Kim, Se Eun; Sung, Ju Young; Yun, Yewon; Jeon, Byeongjun; Moon, Sang Mo; Lee, Han Bin; Lee, Chae Hyun; Jung, Hae Jun; Lee, Jae-Ung; Lee, Sang Woon

doi:10.1016/j.cap.2024.05.011

Current Applied Physics

2024

DOI: 10.1016/j.cap.2024.05.011

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Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review

Se Eun Kim,

Ju Young Sung,

Yewon Yun

et al.

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Atomic layer deposition of high-k and metal thin films for high-performance DRAM capacitors: A brief review

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References 39 publications

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