2015
DOI: 10.1116/1.4936231
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Atomic layer deposition of alternative glass microchannel plates

Abstract: The technique of atomic layer deposition (ALD) has enabled the development of alternative glass microchannel plates (MCPs) with independently tunable resistive and emissive layers, resulting in excellent thickness uniformity across the large area (20 × 20 cm), high aspect ratio (60:1 L/d) glass substrates. Furthermore, the use of ALD to deposit functional layers allows the optimal substrate material to be selected, such as borosilicate glass, which has many benefits compared to the lead-oxide glass used in con… Show more

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Cited by 25 publications
(7 citation statements)
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“…The usual process of hydrogen firing in the preparation of a microchannel has a lot of shortcomings: first, the hydrogen firing process cannot independently adjust the conductive layer and the emission layer [ 10 , 11 ]; second, the heavy metal elements (Pb, Bi) lead to environmental pollution in the lead glass smelting process; third, large areas of MCP will become warped due to the high temperature [ 8 ]; fourth, lead glass being used hydrogen reduction reaction contains K, Rb and other radioactive elements resulting in background noise [ 8 ]; last, hydrogen which residues in the pores become ions due to bias voltage and they will fly in the opposite direction of electron to destroy the cathode of instrument [ 8 , 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…The usual process of hydrogen firing in the preparation of a microchannel has a lot of shortcomings: first, the hydrogen firing process cannot independently adjust the conductive layer and the emission layer [ 10 , 11 ]; second, the heavy metal elements (Pb, Bi) lead to environmental pollution in the lead glass smelting process; third, large areas of MCP will become warped due to the high temperature [ 8 ]; fourth, lead glass being used hydrogen reduction reaction contains K, Rb and other radioactive elements resulting in background noise [ 8 ]; last, hydrogen which residues in the pores become ions due to bias voltage and they will fly in the opposite direction of electron to destroy the cathode of instrument [ 8 , 12 ].…”
Section: Introductionmentioning
confidence: 99%
“…The grating is coated with LiF due to the fact that it is a replica, and the fold mirror is coated with eLiF. The MCP detector plates are ALD processed, which enables the use of stronger substrate materials, improved temporal stability, and larger detector areas (Siegmund et al 2012;Ertley et al 2015;O'Mahony et al 2016).…”
Section: Assembly and Calibrationmentioning
confidence: 99%
“…MCP has a signal amplification effect on two-dimensional electron images. MCP is used in a wide range of applications, including medical imaging, military night vision products, cathode ray tube, photomultiplier tube, ultraviolet astronomy, x-ray image intensifier, nuclear physics, and other fields [2][3][4]. This is due to their direct response sensitivity to ultraviolet rays, various charged particles (such as electrons, ions, neutrons, and protons), and x-rays [5].…”
Section: Introductionmentioning
confidence: 99%