2019
DOI: 10.1021/acsami.8b20437
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Atomic-Layer-Deposited MoNx Thin Films on Three-Dimensional Ni Foam as Efficient Catalysts for the Electrochemical Hydrogen Evolution Reaction

Abstract: Future realization of a hydrogen-based economy requires a high-surface-area, low-cost, and robust electrocatalyst for the hydrogen evolution reaction (HER). In this study, the MoN x thin layer is synthesized on to a high-surface-area three-dimensional (3D) nickel foam (NF) substrate using atomic layer deposition (ALD) for HER catalysis. MoN x is grown on NF by the sequential exposure of Mo­(CO)6 and NH3 at 225 °C. The thickness of the thin film is controlled by varying the number of ALD cycles to maximize th… Show more

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Cited by 51 publications
(44 citation statements)
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“…This observation was in good agreement with MoN x films that were deposited under similar conditions on either SiO 2 /Si or Ni-foam substrates. [21][22][23] Furthermore, the annealing in a H 2 atmosphere at 400 8C had a minimal influence on the phase of ALD-MoN x . However, the minor hump observed at 35-408 (Mo 2 N 111) was much clearer and apparent.…”
Section: Ald Of Monmentioning
confidence: 94%
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“…This observation was in good agreement with MoN x films that were deposited under similar conditions on either SiO 2 /Si or Ni-foam substrates. [21][22][23] Furthermore, the annealing in a H 2 atmosphere at 400 8C had a minimal influence on the phase of ALD-MoN x . However, the minor hump observed at 35-408 (Mo 2 N 111) was much clearer and apparent.…”
Section: Ald Of Monmentioning
confidence: 94%
“…The ALD technique is extensively used to grow various active compounds on different substrates for applications such as Cu diffusion barrier, energy storage devices, and electrocatalysis. [21][22][23][24][25][26][27][28] Recently, ALD has been explored as a fabrication technique for the preparation of various active materials on a highly porous substrate for application in fields such as Li-ion batteries and supercapacitor. [29][30][31][32][33] However, the deposition of MoN x on CC or NCCC has not been reported and studied as a catalyst for HER.…”
Section: Ald Of Monmentioning
confidence: 99%
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