Atomic force microscopy for industry with the Akiyama-Probe sensor

Stücklin, S.; Gullo, M.; Akiyama, T.

doi:10.1109/iconn.2008.4639250

Cited by 5 publications

(4 citation statements)

References 5 publications

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“…Under the action of the tuning fork, the probe has a self-sensing behavior and can convert the deflection of cantilever to a voltage change. Because of the probe’s unique structure, the probe can be benefited from both the tuning fork’s high quality factor [ 14 , 15 ] and a extremely stable oscillation and the silicon cantilever's reasonable spring constant which will produce a smaller tip-sample contact force.…”

Section: System Designmentioning

confidence: 99%

Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Guo

Wang

Dorantes-González

et al. 2011

Sensors

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A hybrid atomic force microscopic (AFM) measurement system combined with white light scanning interferometry for micro/nanometer dimensional measurement is developed. The system is based on a high precision large-range positioning platform with nanometer accuracy on which a white light scanning interferometric module and an AFM head are built. A compact AFM head is developed using a self-sensing tuning fork probe. The head need no external optical sensors to detect the deflection of the cantilever, which saves room on the head, and it can be directly fixed under an optical microscopic interferometric system. To enhance the system’s dynamic response, the frequency modulation (FM) mode is adopted for the AFM head. The measuring data can be traceable through three laser interferometers in the system. The lateral scanning range can reach 25 mm × 25 mm by using a large-range positioning platform. A hybrid method combining AFM and white light scanning interferometry is proposed to improve the AFM measurement efficiency. In this method, the sample is measured firstly by white light scanning interferometry to get an overall coarse morphology, and then, further measured with higher resolution by AFM. Several measuring experiments on standard samples demonstrate the system’s good measurement performance and feasibility of the hybrid measurement method.

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Section: System Designmentioning

confidence: 99%

Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Guo

Wang

Dorantes-González

et al. 2011

Sensors

View full text Add to dashboard Cite

show abstract

“…Because probe combines self actuating and self sensing principle it can be easily integrated into different industrial systems [19]. With 310 µm of length, 28 µm of height and 15 nm of tip diameter it occupies very small space above the sample and allows different approach principles to the sample [20], [22], [23]. All these good characteristics of the probe have inspired us, to start a development of a so Basic idea of this new application is an upgrade of existing application presented in section B (Figure 6).…”

Section: D Akiyama Scanner For Virtual Modeling Of Micro/nano Partsmentioning

confidence: 99%

Interface Between Macro and Nano Worlds

Skorc,

Safaric,

Lukman

et al. 2010

Int. J. Onl. Eng.

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This paper describes the design of a nanorobotic application which includes: nanorobotic arm, Akiyama sensor system, a vacuum chamber, and an interface tools for the nanorobotic hardware developed using C++ and VRML languages in order to create a desktop virtual-reality environment which improves visualisation and prevents collision of the nanomanipulator hardware with the associated workspace. The presented experiment shows how the used man-machine interface could be used for communication between macro and micro/nano worlds.

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“…With 310 µm of length, 28 µm of height and 15 nm of tip diameter it occupies very small space above the sample and allows different approach principles to the sample [20], [22], [23]. All these good characteristics of the probe have inspired us, to start a development of a so Basic idea of this new application is an upgrade of existing application presented in section B (Figure 6).…”

Section: D Akiyama Scanner For Virtual Modeling Of Micro/nano Partsmentioning

confidence: 99%

“…Upgrade has been made in two steps. First Hardware step includes implementation of self oscillation and PLL circuit built according to schematic presented in [20]. Analog signal received from PLL circuit is acquired with NI-PCI6121 A/D card [21] which is integrated into real time target PC presented in section B.…”

Section: D Akiyama Scanner For Virtual Modeling Of Micro/nano Partsmentioning

confidence: 99%

Interface Between Macro and Nano Worlds

Škorc¹,

Šafarič

Lukman³

et al. 2010

Int. J. Onl. Eng.

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Abstract-This paper describes the design of a nanorobotic application which includes: nanorobotic arm, Akiyama sensor system, a vacuum chamber, and an interface tools for the nanorobotic hardware developed using C++ and VRML languages in order to create a desktop virtual-reality environment which improves visualisation and prevents collision of the nanomanipulator hardware with the associated workspace. The presented experiment shows how the used man-machine interface could be used for communication between macro and micro/nano worlds.Index Terms-man-machine interface, nano robot, sensing nano objects.

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Atomic force microscopy for industry with the Akiyama-Probe sensor

Cited by 5 publications

References 5 publications

Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Development of a Hybrid Atomic Force Microscopic Measurement System Combined with White Light Scanning Interferometry

Interface Between Macro and Nano Worlds

Interface Between Macro and Nano Worlds

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