Atomic force microscope nanolithography: dip-pen, nanoshaving, nanografting, tapping mode, electrochemical and thermal nanolithography

Abstract

Atomic force microscopy (AFM) has been widely employed as a nanoscopic lithography technique. In this review, we summarize the current state of research in this field. We introduce the various forms of the technique, such as nanoshaving, nanografting and dip-pen nanolithography, which we classify according to the different interactions between the AFM probe and the substrate during the nanolithography fabrication process. Mechanical force, applied by the tip to the substrate, is the variable that can be controlled with good precision in AFM and it has been utilized in patterning self-assembled monolayers. In such applications, the AFM tip can break some relatively weak chemical bonds inside the monolayer. In general, the state of the art for AFM nanolithography demonstrates the power, resolution and versatility of the technique.

Electronic Transport and Anisotropic Conductivity Behavior on PEDOT:PSS Nanoribbons and Nanostructuring Modification by Atomic Force Microscope Nanoshaving

“…The process of nanoshaving has been described extensively elsewhere [11][12][13][27][28][29]. Briefly, an AFM tip is used, at low force, to image the surface morphology and to select a region for nanolithography.…”

“…The height "thickness" in particular has been a useful tool to determine molecular or structural information [11][12][13][27][28]. The crosssectional analysis indicates the thickness of the nanoribbon and its width, as shown in Figure 4b.…”

“…Utilizing nanofabrication methods of AFM Nanolithography, Nanoshaving, on Nanoribbons of poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT-PSS) by nanoshaving, an atomic force microscopy nanolithography technique [11][12][13], we will explore the limits and flexibility of this material. This process involves an AFM tip under a relatively high force load to shave away or displace material.…”

Use of Thin Sectioning (Nanoskiving) to Fabricate Nanostructures for Electronic and Optical Applications

“…[45] Related techniques include local oxidation, nanoshaving and nanografting using an AFM tip. [46] Indentation lithography using the diamond tip of a commercial nanoindentation system can produce patterns in hard materials, such as silicon dioxide. [47] One of the most effective strategies for developing new approaches to nanofabrication is the adaptive re-use of analytical tools for the purposes of fabrication.…”

Determination of Biomarkers in Exhaled Breath Condensate: A Perspective Way in Bronchial Asthma Diagnostics

“…al, 2002). The very novel platform though, nanoarrays, produced by nanolitographic methods (Bearingers et al, 2009;Rosa & Liang, 2009), e.g. the patented dip pen nanolithography (Lee et al, 2006) is exhibiting a principally much better and consistent sensitivity.…”