2015 IEEE 65th Electronic Components and Technology Conference (ECTC) 2015
DOI: 10.1109/ectc.2015.7159901
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Atomic flux divergence-based AC electromigration model for signal line reliability assessment

Abstract: In this paper, we develop an AC electromigration (EM) model for signal lines manufactured with copper dual damascene process. For the first time, the healing factor of AC EM is quantitatively modeled. To measure EM reliability of interconnects considering timing margins we introduce AC EM functional lifetime. We also develop an atomic flux divergence (AFD)-based void growth model to explain the resistance curves of measured results and calculate the functional EM lifetime of AC signal lines without extracting … Show more

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Cited by 3 publications
(1 citation statement)
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“…Jain et al emphasized the importance of considering EM reliability across the whole workflow from foundry fabrication up to a system design [38]. Guan and Marek-Sadowska [39] analyzed the EM effect on signal line reliability, which carries ac current, and proposed a theoretical model to quantify healing effect due to ac currents. Chen et al investigated the multibranch interconnects suffering from EM effect.…”
Section: Related Workmentioning
confidence: 99%
“…Jain et al emphasized the importance of considering EM reliability across the whole workflow from foundry fabrication up to a system design [38]. Guan and Marek-Sadowska [39] analyzed the EM effect on signal line reliability, which carries ac current, and proposed a theoretical model to quantify healing effect due to ac currents. Chen et al investigated the multibranch interconnects suffering from EM effect.…”
Section: Related Workmentioning
confidence: 99%