Atom probe tomography using an extreme ultraviolet trigger pulse
Benjamin W. Caplins,
Ann N. Chiaramonti,
Jacob M. Garcia
et al.
Abstract:Atom probe tomography (APT) is a powerful materials characterization technique capable of measuring the isotopically resolved three-dimensional (3D) structure of nanoscale specimens with atomic resolution. Modern APT instrumentation most often uses an optical pulse to trigger field ion evaporation—most commonly, the second or third harmonic of a Nd laser is utilized (∼λ = 532 nm or λ = 355 nm). Herein, we describe an APT instrument that utilizes ultrafast extreme ultraviolet (EUV) optical pulses to trigger fie… Show more
We describe an atom probe microscope that is coupled with an ultrafast extreme ultraviolet high-harmonics source to successfully trigger field ion emission from semiconductor, insulating, and cryogenically cooled organic materials.
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