Abstract:Atom Probe Tomography (APT) is an emerging technology used to analyze the three-dimensional structure of a variety of substances at resolutions in the sub-nanometer range. A strong electric field (~20 V/nm) coupled with a sharp needle-shaped specimen (~100 nm diameter end-form) and a twodimensional detector create a point-projection microscope whereby ions are field-evaporated from the surface and diverge to the detector creating a highly-magnified projection of the specimen surface [1]. The specimen preparati… Show more
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