2011
DOI: 10.1063/1.3610468
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Atom probe tomography assessment of the impact of electron beam exposure on InxGa1−xN/GaN quantum wells

Abstract: This study addresses the ongoing debate concerning the distribution of indium in InxGa1−xN quantum wells (QWs) using a combination of atom probe tomography (APT) and transmission electron microscopy (TEM). APT analysis of InxGa1−xN QWs, which had been exposed to the electron beam in a TEM, revealed an inhomogeneous indium distribution which was not observed in a control sample which had not been exposed to the electron beam. These data validate the effectiveness of APT in detecting subtle compositional inhomog… Show more

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Cited by 49 publications
(27 citation statements)
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“…Following the experimental data in Refs. [46][47][48][49][50][51], we treat InGaN as a random alloy. To realize different microscopic configurations, our calculations have been repeated ten times with changing the atomic distribution.…”
Section: Model Systemmentioning
confidence: 99%
“…Following the experimental data in Refs. [46][47][48][49][50][51], we treat InGaN as a random alloy. To realize different microscopic configurations, our calculations have been repeated ten times with changing the atomic distribution.…”
Section: Model Systemmentioning
confidence: 99%
“…The measurements indicate that the peak InN fraction is around 20%, which is much larger than what could be obtained by 1D profiling due to averaging effects between high-and low-In content regions. We also remark that the distribution of In in the QWs not illuminated by the electron beam in the STEM but imaged by APT is similar to the QWs imaged by STEM, indicating that the exposure to the electron beam was sufficiently short not to induce an artificial In rearrangement within the system [42].…”
Section: A Correlative Study Of Ingan/gan Nanowire Quantum Wellsmentioning
confidence: 73%
“…The strain calculation itself can be treated in a multiscale way as described in [16]. The InGaN alloy is treated as a random alloy, assuming that the spatial distribution of indium atoms follows a uniform random distribution, since there is growing consensus that InGaN is in fact forming a uniform random alloy [36,37]. The corresponding statistical probability mass function is that of the binomial distribution.…”
Section: Multiscale Coupling Schemesmentioning
confidence: 99%