1989
DOI: 10.1126/science.243.4887.64
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Atom Counting at Surfaces

Abstract: Multiphoton resonance ionization has been combined with energetic ion bombardment to examine dopant concentrations ofindium on the surface of silicon. The results yield a linear relation between the indium concentration and the known bulk values and a detection limit of 9 parts per trillion, at a mass resolution exceeding 160. This measurement, which surpasses the limits of any previous surface analysis by a factor of 100, has been made possible with an experimental configuration that optimizes sampling and de… Show more

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Cited by 74 publications
(32 citation statements)
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“…In all experiments the 190 0s/ 188 0s ratio served as an internal standard for wavelength adjustment following each sample change or optical realignment. For zero detuning this procedure produces very good agreement between the (1 + a) 2 values for the different even-mass isotope pairs; the isotope ratio measurements converge to define a mean value, (1 + a) 2 = 1.016 ± 0.004. The constancy of the isotopic fractionation for all even-mass isotope pairs indicates control over laser-induced isotopic selectivity substantially exceeding that achieved in previous RIMS studies [8][9][10].…”
Section: Wavelength Dependencementioning
confidence: 97%
See 1 more Smart Citation
“…In all experiments the 190 0s/ 188 0s ratio served as an internal standard for wavelength adjustment following each sample change or optical realignment. For zero detuning this procedure produces very good agreement between the (1 + a) 2 values for the different even-mass isotope pairs; the isotope ratio measurements converge to define a mean value, (1 + a) 2 = 1.016 ± 0.004. The constancy of the isotopic fractionation for all even-mass isotope pairs indicates control over laser-induced isotopic selectivity substantially exceeding that achieved in previous RIMS studies [8][9][10].…”
Section: Wavelength Dependencementioning
confidence: 97%
“…RIMS has been successfully applied to the analysis of nearly 70 elements. Very high sensitivities in trace elemental analysis have been obtained by combining resonance ionization with ion and laser microprobe techniques [1][2][3] or with thermal atomization [4][5][6]. The high efficiency and elemental selectivity [7] make laser resonance ionization a potentially important tool for applications in analytical mass spectrometry.…”
Section: Introductionmentioning
confidence: 99%
“…Wavelength selectivity results from the photon en- ergy being resonant with a transition to an intermediate state. Because the ionization efficiency of a resonant mechanism is greater by many orders of magnitude than nonresonant multiphoton processes (Pappas et al 1989), only those molecules with a transition in resonance with the laser photon are appreciably ionized, which allows us to achieve species-selective ionization. The chromophore we utilize is the benzene ring moiety that has a high absorption cross section at 266 nm associated with electronic excitation of the aromatic ring (π -» π*) This chromophore provides an ionization window on the class of compounds referred to as polycyclic aromatic hydrocarbons (PAHs), which are of fundamental cosmochemical interest.…”
Section: ^L 2 Ms: Methodologymentioning
confidence: 99%
“…It has successfully been used for selective postionization of sputtered neutral species, providing powerful ultratrace analysis capabilities below atomic fractions of 10-~ [1][2][3] while removing only a few monolayers of the substrate. Results obtained using RIS with secondary neutral mass spectrometry (SNMS) are also readily quantifiable.…”
Section: Introductionmentioning
confidence: 99%